Etching characteristics of thin SiON films using a liquefied perfluorocarbon precursor of C6F12O with a low global warming potential

Perfluorocarbon gas is widely used in the semiconductor industry. However, perfluorocarbon has a negative effect on the global environment owing to its high global warming potential (GWP) value. An alternative solution is essential. Therefore, we evaluated the possibility of replacing conventional perfluorocarbon etching gases such as CHF₃ with C₆F₁₂O, which has a low GWP and is in a liquid state at room temperature. In this study, silicon oxynitride (SiON) films were plasma-etched using inductively coupled CF₄ +C₆F₁₂O+O₂ mixed plasmas. Subsequently, the etching characteristics of the film, such as etching rate, etching profile, selectivity over Si, and photoresist, were investigated. A double Langmuir probe was used and optical emission spectroscopy was performed for plasma diagnostics. In addition, a contact angle goniometer and x-ray photoelectron spectroscope were used to confirm the change in the surface properties of the etched SiON film surface. Consequently, the etching characteristics of the C₆F₁₂O mixed plasma exhibited a lower etching rate, higher SiON/Si selectivity, lower plasma damage, and more vertical etched profiles than the conventional CHF₃ mixed plasma. In addition, the C₆F₁₂O gas can be recovered in the liquid state, thereby decreasing global warming. These results confirmed that the C₆F₁₂O precursor can sufficiently replace the conventional etching gas.     

Reliability of a k-out-of-n: G system with common-mode outages

This paper presents the model of a k-out-of-n: G system with common mode outages. The objective is to analytically derive the mean operating mode between failures for a non-repairable component system. The average system failure time and the system availability are also considered. Then, the model is extended to a system with repairable components and unrestricted repair, in which service times are exponentially distributed.     

CuO formation control as a function of mixed ratio of Cu-free powders in the synthesis of YBCO superconductors on Cu substrates

YBa₂Cu₃O_x (Y123) superconducting films were fabricated on Cu substrates using a simple screen-printing method, from Cu-free powders (Y₂O₃ and BaCO₃). In the process, CuO, which causes superconducting properties of Y123 films to deteriorate, was formed on the film surface. By varying the atomic ratio of Y to Ba (Y:Ba = 1:1∼1:4), the ratio needed to prevent CuO formation was found for the film surface that had been heat-treated at 980^∘C for 17 s. The film, with the ratio of Y to Ba (Y:Ba = 1:1), is reheat-treated at 930^∘C for 9 min 30 s to form a superconducting Y123 phase. It was possible to prevent CuO formation by controlling the ratio of Cu-free powders in the mixture and to fabricate YBCO superconductors on Cu substrates using a two-step heat-treatment.     

Unified depth intra coding for 3D video extension of HEVC

With the development of high-efficiency video coding (HEVC), the newest video coding standard, 3D video extension of HEVC (3D-HEVC) has been actively investigated. Since 3D-HEVC uses multi-view texture and depth data for input, various coding tools have been added to HEVC. In 3D-HEVC, on top of the existing 35 HEVC intra modes, eight additional modes exist, which are specifically for depth coding. In this paper, we propose a unified depth intra coding method that incorporates such depth intra modes into the regular intra mode set. In particular, the most rarely used HEVC intra modes are replaced by depth intra modes. As a result, binarization for depth intra modes is removed. Furthermore, the most probable mode selection procedure is modified to consider the elimination of several angular intra modes. The proposed method is implemented and tested on 3D video HEVC test model version 7.0. Simulation results report 2.2 % synthesis gain under all-intra configuration.     

Study on photocatalysis of TiO 2 nanotubes prepared by methanol-thermal synthesis at low temperature

TiO₂ nanotubes were synthesized by the solvothermal process at low temperature in a highly alkaline water–methanol mixed solution. Their characteristics were identified by powder X-ray diffraction (XRD), transmission electron microscopy (TEM), specific surface area (BET), Fourier transform infrared spectroscopy (FTIR) and UV–Vis absorption spectroscopy. The as-prepared samples were tested by the photodegradation reaction of methylene blue (MB) dye under visible-light irradiation. The ratios of methanol and water, as well as calcination temperature, affected the morphology, nanostructure and photocatalytic performance. The methanol solvent plays an important role in improving crystallization of the anatase phase, which affects the photocatalytic reaction. Titanate nanotubes were synthesized in methanol–water volume ratios of 10:90, 20:80 and 30:70 which still had high absorbability. Titania nanotubes formed at a calcination temperature of 300 °C using methanol–water volume ratio of 30:70 showed highest photocatalytic performance, much higher than that using water solvent and TiO₂–P25 powder.     

Design and implementation of SIP UA for a manufacturing network

Session initiation protocol (SIP) provides advanced signaling, controlling its functionality for a variety of multimedia services. It efficiently and scalably locates resources based on a location-independent name to negotiate session characteristics. To a manager of manufacturing facilities, it gives a command to monitor his facilities equipped with SIP via the Internet. The manager can watch the facilities and his field workers could be given direction through video and voice.     

Characteristics and Functional Properties of Protein Isolates from Various Peanut (Arachis hypogaea L.) Cultivars

Protein isolates from 9 cultivars of peanut (Arachis hypogaea L.) were compared. Sephadex G-200 gel filtration and nondenaturing polyacrylamide gel electrophoresis (NPAGE) of the protein isolates showed very similar patterns of arachin and nonarachin fractions. The content of individual fractions was somewhat different among cultivars, possibly indicating genetic variability. Sodium dodecyl sulfate-PAGE (SDS-PAGE) showed that the protein isolates had extremely complex sub-unit compositions. The content of acidic amino acids of the protein isolates was 34–38%, basic was 15–17%. Differences in some functionalities such as solubility and emulsification activity were conspicuous among cultivars.     

Effects of inter-electrode insertion on the performance and thermal flow fields of a hollow-electrode plasma torch

The effects of inter-electrode insertion on the performance of a hollow-electrode plasma torch have been investigated by numerical analysis. Simulation results revealed that when inter-electrodes are inserted, the arc voltages and plasma powers increase due to the increase in the arc length. In addition,it was predicted that thermal efficiency can be improved with the increase in plasma power by injecting plasma gases through the gaps between inter-electrodes. These unique effects of inter-electrode insertion are a result of the plasma temperatures adjusting themselves to increase arc voltages when the arc column is contracted radially by increasing gas-flow rate or decreasing inter-electrode diameter.     

Mechanoreceptor-Inspired Dynamic Mechanical Stimuli Perception based on Switchable Ionic Polarization

Diverse touch experiences offer a path toward greater human–machine interaction, which is essential for the development of haptic technology. Recent advances in triboelectricity-based touch sensors provide great advantages in terms of cost, simplicity of design, and use of a broader range of materials. Since performance solely relies on the level of contact electrification between materials, triboelectricity-based touch sensors cannot effectively be used to measure the extent of deformation of materials under a given mechanical force. Here, an ion-doped gelatin hydrogel (IGH)-based touch sensor is reported to identify not only contact with an object but also deformation under a certain level of force. Switchable ionic polarization of the gelatin hydrogel is found to be instrumental in allowing for different sensing mechanisms when it is contacted and deformed. The results show that ionic polarization relies on conductivity of the hydrogels. Quantitative studies using voltage sweeps demonstrate that higher ion mobility and shorter Debye length serve to improve the performance of the mechanical stimuli-perceptible sensor. It is successfully demonstrated that this sensor offers dynamic deformation-responsive signals that can be used to control the motion of a miniature car. This study broadens the potential applications for ionic hydrogel-based sensors in a human–machine communication system.