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Microstructural change of YBaCuO film/YSZ substrate with and without proton irradiation has been studied by scanning electron microscope and X- ray diffraction techniques. Structural analysis has shown that conversion from tetragonal to orthorhombic phases, reduction of nonsuperconducting phase and preferential rearrangement of crystal grains are all favorable to the improvement of superconductivity in the YBaCuO film supported by YSZ substrate by proton beam bombardment.  相似文献   
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