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Kongpark Patcharee Hacine Souha Latorre Laurent Mailly Frederick Nouet Pascal 《Microsystem Technologies》2017,23(9):3991-4000
In this paper, we present a simple, compact and low-power interface for differential capacitive sensors with a direct digital output. The complete system is composed with a current to voltage converter, an integrator, a comparator and a one-bit digital to analog converter as a feedback. The so-obtained Sigma–Delta modulator is able to deliver directly a bit stream with a ratio of logical ‘1’ directly proportional to the differential capacitance to be measured. A partially integrated prototype has been realized to demonstrate accuracy and non-linearity compatible with a 9-bit sensor.
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