热激励硅谐振式微结构压力传感器若干关键参数设计

针对一种以方形硅膜片为一次敏感元件、硅梁为二次谐振敏感元件的热激励硅微结构压力传感器的实际结构,分析了其工作机理和产生热特性的机制.给出了考虑热特性情况时的传感器的被测压力与输出频率的特性方程;给出了传感器稳定可靠工作的条件;给出了梁谐振子的几何结构参数和激励、拾振电阻几何参数选择与位置设置的原则.     

模糊预测控制及其应用研究*

本文提出一种新的模糊预测控制算法。它将预测控制与模糊控制相结合,应用于一类复杂的工艺过程的终点控制,获得了优良的控制效果,如抗干扰性和模型失配等。本算法在对电弧炉炼钢的氧化过程控制的仿真研究中取得十分满意的效果,它对培养训练操作人员十分有效。     

非线性半导体SiC微粉及其半导体漆（带）特性试验方法的研究

本文介绍了非线性半导体 SiC 微粉及其半导体漆(带)伏安特性的测量方法,以及用微机程序计算其非线性特征参数的方法,从而为研究新型防晕结构提供了科学有效的手段。     

微机械谐振器的快速测试方法

为了缩短微机械谐振器的测量时间,提高测量效率.提出了一种针对压阻检测的微谐振器的频率特性测试新方法,该方法利用欧姆鉴相器,积分器和微处理器实现对微弱信号的有效检测.欧姆鉴相器以检测电阻为鉴相器,利用欧姆定律实现参考信号和被测信号的乘法鉴相运算;通过积分器实现对鉴相结果的积分运算,抑制干扰和噪声;微处理器用于对积分数据的...     

Theoretical and experimental study of capacitance considering fabrication process and edge effect for MEMS comb actuator

This paper introduces a new theoretical model of plate capacitor for MEMS comb actuator. In this model, bulk fabrication process and edge effect are both considered using integration method and conformal transformation theory. In order to verify the correctness of the model, FEM software is used to calculate the value of the capacitance of the MEMS comb actuator. The simulated result is 1.441 pF. Relative errors to the model calculated result 1.401 pF and ideal model calculated result 1.267 pF are 2.78 and 12.07% respectively. Then, high precision capacitance measuring device is used to measure the micro-fabricated comb actuator. The tested result is 1.517 pF. Its relative error to the rectified value is 7.65%, much less than the relative error to ideal result 16.48%. This further indicates the correctness of the rectified model.     

Theoretical and experimental research on the in-plane comb-shaped capacitor for MEMS coriolis mass flow sensor

The Micro-Electro-Mechanical System Coriolis mass flow sensor uses a kind of in-plane comb-shaped capacitor to detect the vibration of tube containing the micro flow information. This paper takes the deflection of the micro tube caused by Coriolis force into account and models the in-plane comb-shaped capacitor of the sensor based on the electrostatic field method. Then the modulation and demodulation of the output capacitive signals are described in detail. The theoretical waveforms obtained by substituting the actual parameters into the models are consistent with the accepted conformal mapping method and match with the sampling signals, which attest the two models. According to the actual flow calibration experiment and the preliminary phase shift calculation, the measurement accuracy of the micro flow sensor reaches ±1.5 % with the repeatability of 0.75 % within 0–1.2 g/h flow range.     

集中式燃油测量系统的双机容错设计与实现

分析了飞机燃油测量系统的发展方向,介绍了集成式燃油测量系统的结构,从提高可靠性的角度对集中式数字燃油测量系统进行了总体设计,并以单片机为基础实现了中央测量单元的双机容错设计。重点分析了双机容错结构的故障监测原理和系统重构策略与过程,给出了故障监测和系统切换的硬件与软件框图。该设计也可用于一般计算机测控系统。     

Study of dynamic characteristics of resonators for MEMS resonant vibratory gyroscopes

Dynamic characteristics of resonators for MEMS resonant vibratory gyroscopes are studied in this paper. Firstly, a small parameter method is introduced to analyze the dynamic characteristic stability of the resonator. It is proved that geometrical parameters of the resonator have to be regulated to match corresponding stability analysis. In order to verify the rationality of the theoretical parameters design, static calibration experiment is built using a resonator sample. It is concluded from the calibrated result that the error between theory design and experiment is 0.03?%, which shows they have a good match, and the design of resonator is reasonable. Moreover, the method of small parameter perturbation is considered to analyze the input–output dynamic characteristic. Under some transformations, which make input angular velocity and output resonant frequency shift possess a good linear relationship. In order to verify the correctness of the theory analysis method, dynamic frequency output characteristic experiment is built using the resonant vibratory gyroscope sample. It is concluded from the dynamic measurement result that the correlation coefficient of output fitted curve is 99.95?%, the measured algorithm scale factor of the gyroscope sample is 0.2116, which prove theoretical analyzing approach is feasible.     

一种超低频电动水平振动台的模型及非线性分析

针对 一种超低频电动水平振动台实际的机电一体化结构，分析了其工作原理，给出了其数学模型，文中特别讨论了振动台的非线性因素，包括磁场的非线性，功率放大器输出的非线性以及动圈反应等方面。这些因素导致了谐波分量的引入，致使波形严重失真，就此提出了减少超低频电动水平振动台的非线性因素的方法。     

影响气体质量流量计若干因素的研究

针对测量气体质量流量的特殊性，分析了气体科氏质量流量计的发展现状及存在的问题；基于气体科氏质量流计的工作机量，讨论了影响气体科氏质量流量计笥能的几种因素；给出了提高气体科氏质量流量计性能的思路与措施。初步研究表明：得到的研究结果与提出的技术措施具有较好实用效果。