Improving SEM Inspection Performance in Semiconductor Manufacturing Industry

Scanning electron microscope (SEM) station is one of the major quality control tasks in wafer manufacturing process. During the process of examining defects on a screen for a certain period of time, SEM inspectors frequently complain about visual fatigue problems. The purpose of the study was to evaluate the effect of wafer‐coating condition (noncoating treatment and gold‐coating treatment) and liquid crystal display (LCD) monitor size (14‐inch and 19‐inch monitor) from the aspects of objective visual fatigue measures (NPA and CFF), subjective eye fatigue rating, and inspection performance. Twelve SEM inspectors participated in this experiment. The results indicated that the treatment of gold‐coating wafer showed significant difference on reducing objective visual fatigue in NPA and CFF change. Using a 19‐inch LCD monitor also demonstrated the effect on reducing eye fatigue as well as improving inspection performance. The improvement of using a gold‐coating treatment wafer and a 19‐inch LCD monitor to reduce SEM inspectors' visual fatigue and to increase inspection performance is thus recommended. © 2012 Wiley Periodicals, Inc.     

A continuous ultrasound‐assisted packed‐bed bioreactor for the lipase‐catalyzed synthesis of caffeic acid phenethyl ester

BACKGROUND: The focus of this paper is the ultrasound‐assisted synthesis of caffeic acid phenethyl ester (CAPE) from caffeic acid and phenyl ethanol in a continuous packed‐bed bioreactor. Immobilized Novozym^® 435 (from Candida antarctica) is used as the catalyst. A three‐level–three‐factor Box–Behnken design and a response surface methodology (RSM) are employed to evaluate the effects of temperature, flow rate, and ultrasonic power on the percentage molar conversion of CAPE. RESULTS: Based on ridge max analysis, it is concluded that the optimum condition for synthesis is reaction temperature 72.66 °C, flow rate 0.046 mL min^?1, and ultrasonic power 1.64 W cm^?2. The expected molar conversion value is 97.84%. An experiment performed under these optimal conditions resulted in a molar conversion of 92.11 ± 0.75%. The enzyme in the bioreactor was found to be stable for at least 6 days. CONCLUSIONS: The lipase‐catalyzed synthesis of CAPE by an ultrasound‐assisted packed‐bed bioreactor uses mild reaction conditions. Enzymatic synthesis of CAPE is suitable for use in the nutraceutical and food production industries. Copyright © 2011 Society of Chemical Industry     

Dynamic and CW linewidth measurements of 1.55-μm InGaAs-InGaAsPmultiquantum well distributed feedback lasers

Measurement of the CW linewidth and frequency chirp as functions of modulation data rate and bias level for 1.55-μm InGaAsP multiquantum-well distributed feedback lasers grown by low-pressure MOCVD are presented. The results show that the CW linewidth of asymmetric facet-coated multiquantum-well DFB lasers can be as low as 2.0 MHz at 13.5 mW output power. The frequency chirp increases with modulation data rate and is significantly larger if the laser off-state is below threshold than if it is above threshold. The 20 dB down chirp widths are in the range of 1.9-5 Å for 40 mA peak-to-peak modulation current at 10 Gb/s under above-threshold bias     

Intermodulation distortion in a multiple-quantum-well semiconductor optical amplifier

The measurement of intermodulation distortion (IMD) induced by carrier-density modulation in a multiple-quantum-well (MQW) semiconductor amplifier is reported. The results show that MQW amplifiers have 15 dB less IMD than conventional buried-heterostructure semiconductor amplifiers. The IMD is dependent on the output power of the amplifiers, which confirms that the carrier-density modulation is the dominant nonlinear mechanism in MQW amplifiers. In addition, the results show that, unlike conventional buried-heterostructure amplifiers, MQW amplifiers have at least two time constants (200-250 ps and <10 ps) for the gain recovery process.<>     

Tracking control of DC motors via an improved chatteringalleviation control

An improved version of the chattering alleviation control (CAC) augmented with boundary layers is proposed. It preserves all the features of CAC and exhibits three additional advantageous properties. First, the resultant control law is continuous instead of the discontinuous function proposed in CAC. Second, the chattering level is smaller than that of CAC. Third, the parameters in the boundary layer approach can be determined quantitatively via this algorithm. The resultant system via this nonlinear feedback control law is proved to be asymptotically stable, which is then applied to the tracking control of DC motors. Experimental results indicate that the high-speed tracking of the desired trajectory can be achieved. In addition, the applied armature voltage contains fewer higher frequency components as compared to other variable structure systems control     

Digital rights management system with user privacy,usage transparency,and superdistribution support

In the modern world, digital content has been massively produced, distributed, and consumed by human beings; consequently, how to protect the rights and benefits of content consumers, producers, and distributors has become a crucial issue. One promising solution is to design a full‐fledged digital rights management (DRM) system. In this study we introduce a new design on the digital rights management system providing user privacy, usage transparency, and superdistribution. A comprehensive set of DRM processing functions and corresponding mechanisms are developed in our system to support various business process requirements. Superdistribution support is embedded in our system design. A prototype is implemented to verify our system design. To protect consumer privacy, a temporary identity is generated for each consumer using the KryptoKnight protocol. Elliptic curve cryptography‐based encryption scheme is adopted for messages transmitted among servers and client over an unsecure communication channel. For usage transparency, a user‐friendly DRM client package (software) is introduced in the proposed DRM system to achieve content protection and support user convenience in usage.Copyright © 2012 John Wiley & Sons, Ltd.     

Regulation of BRCA1 and BRCA2 expression in human breast cancer cells by DNA-damaging agents

Germline mutations in the breast cancer susceptibility genes BRCA1 and BRCA2 have been linked to the development of breast cancer, ovarian cancer, and other malignancies. Recent studies suggest that the BRCA1 and BRCA2 gene products may function in the sensing and/or repair of DNA damage. To investigate this possibility, we determined the effects of various DNA-damaging agents and other cytotoxic agents on the mRNA levels of BRCA1 and BRCA2 in the MCF-7 and other human breast cancer cell lines. We found that several agents, including adriamycin (a DNA intercalator and inhibitor of topoisomerase II), camptothecin (a topoisomerase I inhibitor), and ultraviolet radiation induced significant decreases in BRCA1 and BRCA2 mRNA levels. Decreased levels of BRCA1 and BRCA2 mRNAs were observed within 6-12 h after treatment with adriamycin and persisted for at least 72 h. Adriamycin also induced decreases in BRCA1 protein levels; but these decreases required several days. U.V. radiation induced dose-dependent down-regulation of BRCA1 and BRCA2 mRNAs, with significant decreases in both mRNAs at doses as low as 2.5 J/m2, a dose that yielded very little cytotoxicity. Adriamycin-induced down-regulation of BRCA1 and BRCA2 mRNAs was first observed at doses that yielded relatively little cytotoxicity and little or no apoptotic DNA fragmentation. Adriamycin and U.V. radiation induced distinct dose- and time-dependent alterations in the cell cycle distribution; but these alterations did not correlate well with corresponding changes in BRCA1 and BRCA2 mRNA levels. However, the adriamycin-induced reduction in BRCA1 and BRCA2 mRNA levels was correlated with p53 functional status. MCF-7 cells transfected with a dominant negative mutant p53 (143 val-->ala) required at least tenfold higher doses of adriamycin to down-regulate BRCA1 and BRCA2 mRNAs than did parental MCF-7 cells or control-transfected MCF-7 clones. These results suggest that BRCA1 and BRCA2 may play roles in the cellular response to DNA-damaging agents and that there may be a p53-sensitive component to the regulation of BRCA1 and BRCA2 mRNA expression.     

A reproducible ohmic contact to n-type GaAs0.6P0.4

A study is reported on several alternate metal systems based upon AuGeNiCr, which provide reproducibly $\text{～10}{}^{\mathrm{?4}}\text{Ω-}\text{cm}{}^2$ specific contact resistance to n-type GaAs_0.6P_0.4, employing the conventional open-tube sintering furnace. A simple metallurgical model is presented to explain the success of this technique. It is found that a thin chromium-oxide film is formed during the heat treatment, which is thought to prevent metal pads from balling-up, and volatile components of the semiconductor from evaporating. In this way, the metal-semiconductor interface re-growth process is optimized to consistently provide low resistance ohmic contacts.     

An Introduction to Engineering Through an Integrated Reverse Engineering and Design Graphics Project

This paper discusses a new freshman course that merges previous topics in the “Introduction to Mechanical Engineering” and “Engineering Design Graphics” courses into a single integrated teaching effort. The main objective of the new course is to introduce students to mechanical engineering education and practice through lectures and laboratory experiences. A major effort in the course is devoted to a reverse engineering team project. The students are divided into four‐member teams and are instructed to select a simple mechanical assembly for dissection. They study and disassemble their object into basic constituent components, documenting this process with freehand sketches and notes. They use these sketches and other measured dimensions to construct 3‐D solid computer models of each major component. The teams then obtain .STL files of the solid models, which are used to make rapid physical prototypes of their parts. The teams conclude their project activities by generating engineering drawings directly from the 3‐D geometric data base. All of these efforts are integrated, documented, and submitted to the instructor as a final team project report.