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1.
Advances in micro and nano fabrication technologies for MEMS require high-level measurement techniques with regard to sampling and sensitivity. For this purpose at the Institute of Microtechnology (IMT) highly sensitive piezoresistive 3D force sensors based on SU-8 polymer have been developed. In this paper we present an improved micro fabrication process for a double-sided micro structured design. The sensors are produced by multilayer processing techniques such as UV lithography and coating methods. The double-sided micro structured design demands a photoresist application method which simultaneously features a top side structuring and a casting from a mold. We use a new micro molding process to meet the demands. The micro fabrication technology is described, focusing on the development of the molding structure for shaping of the bottom side and a capable release process for the detachment of the molded structures. The fabrication process of the SU-8 mold layer is optimized to fabricate molding structures with heights from a few μm up to 350 μm. Therefore different SU-8 formulations, namely with classification numbers 5, 25, 50, and 100, have been used. The fundamental limitations for the mold design result from the lithography process, which defines the smallest lateral resolution, and from the characteristics of a molding process, e.g. the impossibility to realize an undercut. To allow for reliable release, the molding structures have to be coated with a sacrificial layer. Silicon nitride is deposited onto the substrate with accompanying monitoring of the deposition temperature during the PECVD process. 相似文献
2.
D. Dietzel M. Feldmann C. Herding U. D. Schwarz A. Schirmeisen 《Tribology Letters》2010,39(3):273-281
Measuring interfacial friction during the manipulation of nanoparticles is becoming an increasingly important approach in
nanotribology research. In this work, antimony and gold particles deposited on flat graphite surfaces have been translated
by the tip of an atomic force microscope in contact mode along defined pathways. Two different manipulation techniques are
discussed with respect to pathway control and friction quantification. The first technique includes pushing the particles
from the side, which often results in a loss of the particle during translation due to unwanted sidewards motion. We analyze
this phenomenon with an analytical model and find good agreement with experiments. An alternative approach is to move the
particle while the tip remains on its top. We demonstrate that this approach allows better manipulation pathway control and
that simultaneous interfacial friction measurements are in quantitative agreement with the first manipulation method. 相似文献
3.
V. Hable C. Greubel A. Bergmaier P. Reichart A. Hauptner R. Krücken H. Strickfaden S. Dietzel T. Cremer G.A. Drexler A.A. Friedl G. Dollinger 《Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms》2009,267(12-13):2090-2097
We describe a new setup at the ion microprobe SNAKE (Superconducting Nanoscope for Applied nuclear (Kern-) physics Experiments) at the Munich 14 MV Tandem accelerator that facilitates both living cell irradiation with sub micrometer resolution and online optical imaging of the cells before and after irradiation by state of the art phase contrast and fluorescence microscopy. The cells are kept at standard cell growth conditions at 37 °C in cell culture medium. After irradiation it is possible to switch from single ion irradiation conditions to cell observation within 0.5 s. First experiments were performed targeting substructures of a cell nucleus that were tagged by TexasRed labeled nucleotides incorporated in the cellular DNA by 55 MeV single carbon ion irradiation. In addition we show first online sequences of short time kinetics of Mdc1 protein accumulation in the vicinity of double strand breaks after carbon ion irradiation. 相似文献
4.
Comparing the input, output, and validation maps for several models of land change 总被引:31,自引:0,他引:31
Robert Gilmore Pontius Jr Wideke Boersma Jean-Christophe Castella Keith Clarke Ton de Nijs Charles Dietzel Zengqiang Duan Eric Fotsing Noah Goldstein Kasper Kok Eric Koomen Christopher D. Lippitt William McConnell Alias Mohd Sood Bryan Pijanowski Snehal Pithadia Sean Sweeney Tran Ngoc Trung A. Tom Veldkamp Peter H. Verburg 《The Annals of Regional Science》2008,42(1):11-37
This paper applies methods of multiple resolution map comparison to quantify characteristics for 13 applications of 9 different
popular peer-reviewed land change models. Each modeling application simulates change of land categories in raster maps from
an initial time to a subsequent time. For each modeling application, the statistical methods compare: (1) a reference map
of the initial time, (2) a reference map of the subsequent time, and (3) a prediction map of the subsequent time. The three
possible two-map comparisons for each application characterize: (1) the dynamics of the landscape, (2) the behavior of the
model, and (3) the accuracy of the prediction. The three-map comparison for each application specifies the amount of the prediction’s
accuracy that is attributable to land persistence versus land change. Results show that the amount of error is larger than
the amount of correctly predicted change for 12 of the 13 applications at the resolution of the raw data. The applications
are summarized and compared using two statistics: the null resolution and the figure of merit. According to the figure of
merit, the more accurate applications are the ones where the amount of observed net change in the reference maps is larger.
This paper facilitates communication among land change modelers, because it illustrates the range of results for a variety
of models using scientifically rigorous, generally applicable, and intellectually accessible statistical techniques. 相似文献
5.
6.
The effect of a silicate-based plasma anodization treatment on the corrosion and stress corrosion cracking behaviour of a cast AM50 magnesium alloy was studied. Electrochemical tests revealed the beneficial effect of the plasma electrolytic oxidation (PEO) in improving the corrosion resistance of the alloy. Although the coating had provided an improved resistance to stress corrosion cracking in this test environment at a nominal strain rate of 10−6 s−1, it could not completely eliminate the SCC susceptibility of the alloy. Cracking of the coating under conditions of straining was found to be the reason for SCC of PEO-coated alloy. 相似文献
7.
Magnesium alloys are very biocompatiable and show promise for use in orthopaedic implant. Significant progress of research on bioabsorbable magnesium stents and orthopaedic bones has been achieved in recent years. The issues on degradation, hydrogen evolution, and corrosion fatigue and erosion corrosion of magnesium alloys and various influencing factors in simulated body fluid (SBF) are discussed. The research progress on magnesium and its alloys as biomaterials and miscellaneous approaches to enhancement in corrosion resistance is reviewed. Finally the challenges and strategy for their application as orthopaedic biomaterials are also proposed. 相似文献
8.
An attempt was made to understand the effect of silicate based plasma electrolytic oxidation (PEO) coating on the stress corrosion cracking (SCC) behaviour of an AZ61 wrought magnesium alloy. The SCC behaviour of untreated and PEO coated specimens was assessed using slow strain rate tensile tests at two different nominal strain rates, viz. 1 × 10−6 s−1 and 1 × 10−7 s−1, in ASTM D1384 test solution at ambient conditions. The PEO coating was found to improve the general corrosion resistance to a significant extent; however, the improvement in the resistance to stress corrosion cracking was only marginal. 相似文献
9.
Physical vapour deposition with energetic ions is an established technology for creating functional surfaces where changing morphologies are observed with increasing energy deposition. In this presentation, magnetron sputtering (MS) is compared with ion beam sputtering (IBS) and vacuum arc deposition (VAD) for corrosion resistant Mg coatings. With increasing average energy flux along the three methods, a transition from a columnar growth regime towards a layer-by-layer growth at increased energies was observed, while a basal texture with the c-axis normal to the surface was found in all cases. However, the full width at half maximum (FWHM) of the corresponding Mg(002) rocking curves showed a pronounced minimum of 3° for IBS deposited films, apparently caused by the reflected high energy primary Ar+ ions. For pure Mg films, no larger differences in the corrosion potential and the corrosion rates were measured. 相似文献
10.
J. van den Brand J. de Baets T. van Mol A. Dietzel 《Microelectronics Reliability》2008,48(8-9):1123-1128
Systems-in-foil are a new class of electronics in which a full system is integrated into a flexible end product. In this paper, we discuss current research activities and state-of-the-art in this field. Furthermore, some of the associated and expected reliability issues will be addressed on the basis of three examples. As a first example we discuss a flexible large area polymeric organic light-emitting (OLED) device. The reliability targets of these devices require protection against the detrimental influence of water. As a second example, we describe a technology for embedding thinned Si chips between polymeric foils where a careful selection of the base materials is important to account for thermal expansion differences. Finally, as a third example, a novel technology for embedding conductive circuitry in a polymeric foil is discussed in which a good matching of the elastic moduli of the polymeric foil and the embedded circuitry is crucial for the flexibility robustness. 相似文献