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本文阐述了微型机电系统领域中微泵的几种常见的致动方式及其特点。根据硅微泵的结构特点,制作出用于微型泵的电磁致动器,并对该电磁致动器进行了分析与振动测试。 相似文献
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Theresearch results of “the fundamental technologies of micropumps”, being part of thekey project of “the fundamental research on the theories and technologies of micromanufacturing” supported by the National Nature Science Foundation of China, aresummarized and the continued research work is also introduced in this paper. And thecharacteristics of microelectromechanical systems are described based on the researchactivities of the micro fluidic systems. Microelectromechanical systems will open up moreand more applications with the breakthrough progress in the key fundamental researches. Itis a chance for us to develop the field of MEMS while MEMS are just being promoted roundlyin the world. 相似文献
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