High performance 35 nm gate length CMOS with NO oxynitride gate dielectric and Ni salicide

The 35 nm gate length CMOS devices with oxynitride gate dielectric and Ni salicide have been fabricated to study the feasibility of higher performance operation. Nitrogen concentration in gate oxynitride was optimized to reduce gate current I/sub g/ and to prevent boron penetration in the pFET. The thermal budget in the middle of the line (MOL) process was reduced enough to realize shallower junction depth in the S/D extension regions and to suppress gate poly-Si depletion. Finally, the current drives of 676 /spl mu/A//spl mu/m in nFET and 272 /spl mu/A//spl mu/m in pFET at V/sub dd/=0.85 V (at I/sub off/=100 nA//spl mu/m) were achieved and they are the best values for 35 nm gate length CMOS reported to date.     

Pose-Invariant Facial Expression Recognition Using Variable-Intensity Templates

In this paper, we propose a method for pose-invariant facial expression recognition from monocular video sequences. The advantage of our method is that, unlike existing methods, our method uses a simple model, called the variable-intensity template, for describing different facial expressions. This makes it possible to prepare a model for each person with very little time and effort. Variable-intensity templates describe how the intensities of multiple points, defined in the vicinity of facial parts, vary with different facial expressions. By using this model in the framework of a particle filter, our method is capable of estimating facial poses and expressions simultaneously. Experiments demonstrate the effectiveness of our method. A recognition rate of over 90% is achieved for all facial orientations, horizontal, vertical, and in-plane, in the range of ±40 degrees, ±20 degrees, and ±40 degrees from the frontal view, respectively. Electronic Supplementary Material  The online version of this article () contains supplementary material, which is available to authorized users.     

A procedure to analyze surface profiles of the protein molecules visualized by quick-freeze deep-etch replica electron microscopy

Quick-freeze deep-etch replica electron microscopy gives high contrast snapshots of individual protein molecules under physiological conditions in vitro or in situ. The images show delicate internal pattern, possibly reflecting the rotary-shadowed surface profile of the molecule. As a step to build the new system for the "Structural analysis of single molecules", we propose a procedure to quantitatively characterize the structural property of individual molecules; e.g. conformational type and precise view-angle of the molecules, if the crystallographic structure of the target molecule is available. This paper presents a framework to determine the observed face of the protein molecule by analyzing the surface profile of individual molecules visualized in freeze-replica specimens. A comprehensive set of rotary-shadowed views of the protein molecule was artificially generated from the available atomic coordinates using light-rendering software. Exploiting new mathematical morphology-based image filter, characteristic features were extracted from each image and stored as template. Similar features were extracted from the true replica image and the most likely projection angle and the conformation of the observed particle were determined by quantitative comparison with a set of archived images. The performance and the robustness of the procedure were examined with myosin head structure in defined configuration for actual application.     

Highly accurate SNR measurement using the covariance of two SEM images with the identical view

Quality of an SEM image is strongly influenced by the extent of noise. As a well-known method in the field of SEM, the covariance is applied to measure the signal-to-noise ratio (SNR). This method has potential ability for highly accurate measurement of the SNR, which is hardly known until now. If the precautions discussed in this article are adopted, that method can demonstrate its real ability. These precautions are strongly related to "proper acquisition of two images with the identical view," "alignment of an aperture diaphragm," "reduction of charging phenomena," "elimination of particular noises," and "accurate focusing," As necessary, characteristics in SEM signal and noise are investigated from a few standpoints. When using the maximum performance of this measurement, SNR of many SEM images obtained in a variety of the SEM operating conditions and specimens can be measured accurately.     

The effect of adding Ni and Ge microelements on the electromigration resistance of low-Ag based SnAgCu solder

Low-Ag-based Pb-free solder and its evaluation for electromigration (EM) reliability are research areas of active development. This paper studies the effect of adding Ni and Ge microelements on the EM behavior of low-Ag-based SnAgCu solder. Comparative measurements of the EM resistance of Sn1.0Ag0.5Cu (SAC) and Sn1.0Ag0.5Cu0.07Ni0.01Ge (SACNG) solders (in wt?%) were conducted. In these experiments, SACNG showed a higher EM resistance than SAC. It was concluded that adding Ni and Ge enhanced the EM resistance of low-Ag-based SnAgCu solders. This shows the same effect of Ni and Ge on the EM resistance as that which has been reported for Sn3.5Ag0.5Cu solder. An analysis of these observations suggests that grain boundary sliding plays a dominant role in stress relaxation and causes hillock growth. Based on this assumption, a possible mechanism was proposed to explain the effects of Ni and Ge on the EM resistance of SnAgCu solder.     

Characterization of polymer films using a slow positron beam

Polymer structures have been investigated using positron annihilation lifetime spectroscopy (PALS) with a slow positron beam as well as a conventional radioactive source (²²Na). The properties of the free volume holes near the polymer surface were studied as a function of the positron implantation energy. The longest lifetime was associated with ortho-positronium (o-Ps) annihilation in the free volume holes. In polytetrafluoroethylene film, the lifetime of o-Ps was observed to decrease with increasing positron implantation depth, and a significant change in the o-Ps lifetime was found at a short distance (about 10 nm) from the surface, while its intensity increased. This result implies that near the polymer surface the free volume holes become larger that in the bulk. The effect of temperature on the polymer sub-surface layers was also studied. For high molecular weight polystyrene, the glass transition temperature for the sub-surface was lower than that for the bulk and thermal expansion coefficient of the sub-surface layers was found to be larger than the bulk value. Electronic Publication     

Effect of metal cation type on the structure and properties of ethylene ionomers

Thermal properties by DSC, stiffness, melt viscosity, tensile properties, and dynamic mechanical properties were measured for the Na⁺, K⁺, Mg²⁺, Zn²⁺, Cu²⁺, Mn²⁺, and Co²⁺ salts of poly(ethylene-co-methacrylic acid) (EMAA). The changes in the structure and properties with increasing neutralization are larger in the alkaline and alkaline earth metal salts than in the transition metal salts. The stiffness shows a maximum at 33% neutralization in both the alkaline and alkaline earth metal salts, while no maxima are found up to 60% neutralization in the transition metal salts. The microphase separation of salt group aggregates is observed in both the alkaline and alkaline earth metal salts, but is not seen in the transition metal salts. These differences were attributed to both the stronger ionic interactions and the larger number of carboxyl groups associated with the alkaline and alkaline earth metal salts in the ordered structure of ionic salt groups (ionic crystallites). The mechanical properties measured at low strain, such as stiffness and yield stress, strongly depend on the degree of the crystalline order of the ionic crystallites. The high-strain properties, such as tensile strength and elongation at break, depend on the strength of the ionic interactions and the valence of the cation.     

Electro-oxidation rate ofp-tert-butyltoluene in a bipolar packed-bed electrode cell

The side chain methoxylation ofp-tert-butyltoluene was carried out in a bipolar packed-bed electrode cell in which graphite pellets of diameter 4.74 mm and length 5mm were randomly packed in nine layers separated by inert mesh spacers. The reaction consisted of main consecutive reactions leading top-tert-butylbenzyl methyl ether andp-tert-butylbenzaldehyde dimethyl acetal (TBDA) and polymerization reactions. Overall reaction rate coefficients for each reaction step, current efficiency and energy consumption were determined on the basis of a reactor model. The selectivity and the current efficiency for TBDA increased with increasing current, but the energy consumption began to rise when the current exceeded 0.8 A. An addition of supporting electrolyte suppressed the overall reaction rate coefficients, although it decreased the energy consumption.     

Mechanical scanning of the specimen in the scanning electron microscope

A scanning electron microscope (SEM) system equipped with a motor drive specimen stage fully controlled with a personal computer (PC) has been utilized for obtaining ultralow magnification SEM images. This modem motor drive stage works as a mechanical scanning device. To produce ultra-low magnification SEM images, we use a successful combination of the mechanical scanning, electronic scanning, and digital image processing techniques. This new method is extremely labor and time saving for ultra-low magnification and wide-area observation. The option of ultra-low magnification observation (while maintaining the original SEM functions and performance) is important during a scanning electron microscopy session.     

Crystallographic, Thermoelectric, and Mechanical Properties of Polycrystalline Ba8Al x Si46−x Clathrates

The Al content dependence of crystallographic, thermoelectric, and mechanical properties is reported for polycrystalline Ba₈Al _x Si_46?x (nominal x = 15 to 17) clathrates prepared by combining arc melting and spark plasma sintering methods. The elastic constants and the coefficient of thermal expansion (CTE), which are also important properties for designing thermoelectric devices, are presented. Powder x-ray diffraction, scanning electron microscopy, and energy-dispersive x-ray spectroscopy (EDX) indicate that the type I clathrate is the major phase of the samples but impurity phases (mainly BaAl₂Si₂, Si, and Al) are included in the samples with high Al contents. The actual Al content x determined by EDX ranges from approximately 14 to 15. The absolute value of the Seebeck coefficient increases and the electrical conductivity decreases as the Al content increases. The changes in Seebeck coefficient and electrical conductivity are explained in terms of the dependence of the carrier concentration on the Al content. The elastic constants and the CTE of the samples depend weakly on the Al content. Some of the properties are compared with reported data of single crystals of Ba₈Al₁₆Ge₃₀, Ba₈Ga₁₆Ge₃₀, Sr₈Ga₁₆Ge₃₀, silicon, and germanium as standard references. The effective mass, Hall carrier mobility, and lattice thermal conductivity, which govern the transport properties, are determined to be ~ 2.4m ₀, ~ 7 cm² V^?1 s^?1, and ~ 1.3 W m^?1 K^?1, respectively, for actual Al content x of about 14.77. The thermoelectric figure of merit ZT is estimated to be about 0.35 at 900 K for actual Al content x of about 14.77.