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MEMS(Micro Electro Mechanical System,微机电系统)同振型仿生矢量水听器采用MEMS二维仿生矢量水听器和标准声压水听器一体化封装,保证了通道间的严格正交,海试环境下性能测试具有“8”字形余弦指向性和较高的灵敏度.在性能测试的基础上对水听器的定向能力进行了实验研究,实验结果表明:同振型矢量水听器能够实现声目标定向(定向误差小于3°)和运动目标的航迹跟踪,为后续的工程化应用打下了基础. 相似文献
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随着管道越埋越深,基于声检测原理的地面标记是现今管道技术的发展趋势.针对目前对管道内检测器标记难的现状,首次提出一种高灵敏度、高信噪比、高分辨率的新型MEMS仿生矢量声传感器运用到地面标记系统中.该文将该传感器与目前广泛应用在地面标记系统中的压电陶瓷振动传感器和动圈式高灵敏度地震检波器进行了不同的模拟对比实验.实验结果表明,MEMS仿生矢量声传感器具有检测距离长,可靠性能好,对土壤环境要求低等优点,从而验证了MEMS仿生矢量声传感器检测微弱信号的可行性和其在标记定位管道内检测器方向的良好的应用前景. 相似文献
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This paper describes the design,simulation,processing and test result of a high sensitivity accelerometer based on the piezoresistive effect which uses an overlay bridge detection method.The structure of this accelerometer is supersymmetric "mass-beams".This accelerometer has 8 beams,where two varistors are put in the two ends.Four varistors compose a Wheatstone bridge and the output voltages of the 4 Wheatstone bridges have been superimposed as the final output voltage.The sensitivity of the accelerometer can be improved effectively by these clever methods. A simplified mathematical model has been created to analyze the mechanical properties of the sensor,then the finite element modeling and simulation have been used to verify the feasibility of the accelerometer.The results show that the sensitivity of the accelerometer is 1.1381 m V/g,which is about four times larger than that of the single bridge accelerometers and series bridge sensor.The bandwidth is 0-1000 Hz which is equal to that of the single bridge accelerometers and the series bridge sensor.The comparison reveals that the new overlay detection bridge method can improve the sensitivity of the sensor in the same bandwidth.Meanwhile,this method provides an effective method to improve the sensitivity of piezoresistive sensors. 相似文献
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一种MEMS同振柱型仿生矢量水听器的研制 总被引:1,自引:0,他引:1
提出了一种结合MEMS技术、仿生原理和压阻原理的同振柱型矢量水听器,即由二维仿生水听器和声压水听器组合而成的柱体。在声学理论基础上详细介绍了该水听器的封装设计及制作过程,在国防水声一级计量站对该矢量水听器进行校准实验,实验结果表明:该同振型矢量水听器的工作频带范围为0~3 kHz;X通道灵敏度-177.9 dB(2 kHz),Y通道灵敏度-175.4 dB(2 kHz),声压通道灵敏度-175.8 dB(2 kHz);具有很好的"8"字指向性;可承受3 MPa压力。此新型MEMS同振矢量水听器适用于民用船只避障,渔业捕捞,海洋勘探等领域。 相似文献
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随着微机电(MEMS)产业的兴起,加速度计正在向微型化,集成化,高可靠性,高灵敏度的方向发展,具有广泛的军事和民用前景。在此提出了一种压敏电阻完全对称分布的“8梁—质量块”结构的硅微压阻式三轴加速度计,与传统的单悬臂梁结构或悬臂梁—质量块结构相比,这种结构具有更高的灵敏度和更小的轴间耦合度。介绍了采用ANSYS软件进行结构分析的过程,给出了三轴加速度计敏感单元的制作工艺流程。通过对加速度计的静态测试得出X、Y、Z轴的灵敏度分别为SX=48*10-6V/g, SY=54*10-6V/g, SZ=217*10-6V/g,非线性度分别为0.4%,0.6%,0.4% 。 相似文献
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