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浸没式光刻的优势和可行性   总被引:3,自引:2,他引:3  
浸没式光刻通过高折射率的液体充入透镜底部和片子之间的空间使光学系统的数值孔径具有显著的优势。在193nm曝光系统中,水(折射率为1.44)被选作最佳的浸入液体。通过成像模拟,现已证明ArF穴193nm雪浸没式光刻(NA=1.05~1.23)与F2穴157nm雪干法穴NA=0.85~0.93雪光刻具有几乎相同的成像性能。结合流体力学和热模拟结果,讨论了ArF浸没式曝光设备的优势和可行性。  相似文献   
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A photoelastic technique for the evaluation of the isochromatic fringe patterns of practical Mode I fracture test specimen is presented.The new procedure uncouples the expressions for the stress intensity factor K and the non-singular stress term A from the governing maximum shear expression by employing a line perpendicular to the crack-tip in a photoelastic specimen, (this line intersects the isochromatic fringes at the locus of points ri, θi = π/2, i = 1,2,…, n, where n is the maximum analizable fringe) in developing the least-squares technique employed in this research.The least-squares expressions developed required no assumption of initial values for the stress intensity factor K and the non-singular stress term A. The accuracy of the approach is then demonstrated by obtaining the K and A values of some practical Mode I specimens under applied uniaxial and biaxial stresses.  相似文献   
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Ultra-high molecular weight polyethylene (UHMWPE)/ graphene nanoplatelets (GNPs) nanocomposite coatings were developed to reduce friction and wear in the absence of liquid lubrication. UHMWPE nanocomposite powders with different loadings (0.25, 1, and 2 wt.%) of GNPs were prepared and electrostatic spraying technique was then used to deposit the nanocomposite powders on aluminum alloy to form a thin coating. Friction and wear tests were conducted on the coatings against a flat-end pin, made of hardened tool steel to determine the best loading of GNPs. That was further tested to investigate the effect of sliding speed and contact pressure on its tribological properties and to establish coating operating limits. Results showed that UHMWPE nanocomposite coating reinforced with 1 wt.% GNPs showed the best tribological performance. It reduced wear rate by about 51% as compared to the pristine UHMWPE coating. The coating sustained a maximum sliding speed of 1 m/s at a contact pressure of 4 MPa equivalent to a pressure and velocity (PV) value of 4 MPa.m/s.  相似文献   
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Biobased composites were manufactured with a compression‐molding technique. Novel thermoset resins from soybean oil were used as a matrix, and flax fibers were used as reinforcements. The air‐laid fibers were stacked randomly, the woven fabrics were stacked crosswise (0/90°), and impregnation was performed manually. The fiber/resin ratio was 60 : 40. The prepared biobased composites were characterized by impact and flexural testing. Scanning electron microscopy of knife‐cut cross sections of the specimens was also done to investigate the fiber–matrix interface. Thermogravimetric analysis of the composites was carried out to provide indications of thermal stability. Three resins from soybean oil [methacrylated soybean oil, methacrylic anhydride modified soybean oil (MMSO), and acetic anhydride modified soybean oil] were used as matrices. The impact strength of the composites with MMSO resin reinforced with air‐laid flax fibers was 24 kJ/m2, whereas that of the MMSO resin reinforced with woven flax fabric was between 24 and 29 kJ/m2. The flexural strength of the MMSO resin reinforced with air‐laid flax fibers was between 83 and 118 MPa, and the flexural modulus was between 4 and 6 GPa, whereas the flexural strength of the MMSO resin reinforced with woven fabric was between 90 and 110 MPa, and the flexural modulus was between 4.87 and 6.1 GPa. © 2010 Wiley Periodicals, Inc. J Appl Polym Sci, 2010  相似文献   
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International Journal of Information Security - The introduction of advanced metering infrastructure (AMI) smart meters has given rise to fine-grained electricity usage data at different levels of...  相似文献   
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The responses of adjoining structures to blast induced ground vibrations emanating from Kopek Construction Quarry, Ikere – Ekiti in Ekiti State were evaluated and predicted. Five off site receptors at predetermined distances from the blast source were chosen and the Peak Particle Velocity (PPV) at each receptor during blasting was estimated using the squared root scaled distance equation. The estimated PPVs were compared with the USBM – RI 8705 reference. The results showed that the blast induced vibrations from the quarry site were within the recommended limits and were insignificant to warrant concerns of causing structural damages to buildings in proximity to the quarry site with the given blast design parameters.  相似文献   
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