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The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.  相似文献   
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This paper proposes a frequency domain algorithm for Wiener model identifications based on exploring the fundamental frequency and harmonics generated by the unknown nonlinearity. The convergence of the algorithm is established in the presence of white noise. No a priori knowledge of the structure of the nonlinearity is required and the linear part can be nonparametric.  相似文献   
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Years have lapsed since the inauguration of the first Wireless Application Protocol (WAP) application. One of the main reasons for the lukewarm response so far may be attributed to the lack of a “Killer” application. Many companies and developers have attempted to replicate email services (an Internet Killer appplication) within the WAP realm, but till now, no significant success has been reported. This paper will first discuss on the key functions which are lacking in the present WAP-email service, and which are arguably necessary if a much larger user base is to be attracted to these services. A new system will be proposed which can enable the user to send files residing in a remote personal computer (PC) as attachments to his emails using WAP-enabled mobile devices. The implementation of the system will be presented in details. Issue relating to the connection to various types of email servers and the security of the system will also be addressed in the paper.  相似文献   
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Time-domain limitations due to right half-plane zeros and poles in linear multivariable control systems are studied. Lower bounds on the interaction are derived. They show not only how the location of zeros and poles are critical in multivariable systems, but also how the zero and pole directions influence the performance. The results are illustrated on the quadruple-tank process, which is a new multivariable laboratory process.  相似文献   
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This paper presents a novel concept for power quality hardware and software architecture. Software tools related to detection, classification and characterization of power quality events can be integrated into a Distribution Control Center in which the interconnection between different subsystems is being carried out through the Internet allowing flexibility to the system. This system is implemented using wavelet analysis applied in all proposed algorithms. Different power quality events are taken as examples to illustrate the capabilities of the proposed method. The obtained results reveal that the proposed architecture is feasible to be implemented as an integral part of a control center system.The proposed system has the property of fast and accurate detection and classification of any power quality disturbance event and introduces a new PQ index determination that allows characterizing any type of disturbance including the non-periodic signals.  相似文献   
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Linear discriminant analysis (LDA) is a data discrimination technique that seeks transformation to maximize the ratio of the between-class scatter and the within-class scatter. While it has been successfully applied to several applications, it has two limitations, both concerning the underfitting problem. First, it fails to discriminate data with complex distributions since all data in each class are assumed to be distributed in the Gaussian manner. Second, it can lose class-wise information, since it produces only one transformation over the entire range of classes. We propose three extensions of LDA to overcome the above problems. The first extension overcomes the first problem by modelling the within-class scatter using a PCA mixture model that can represent more complex distribution. The second extension overcomes the second problem by taking different transformation for each class in order to provide class-wise features. The third extension combines these two modifications by representing each class in terms of the PCA mixture model and taking different transformation for each mixture component. It is shown that all our proposed extensions of LDA outperform LDA concerning classification errors for synthetic data classification, hand-written digit recognition, and alphabet recognition.  相似文献   
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