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光通信C波段硅基导模共振窄带滤波器的模拟
引用本文:郭剑川,左玉华,张岭梓,张云,丁武昌,成步文,余金中,王启明.光通信C波段硅基导模共振窄带滤波器的模拟[J].半导体光电,2009,30(5).
作者姓名:郭剑川  左玉华  张岭梓  张云  丁武昌  成步文  余金中  王启明
作者单位:中国科学院半导体研究所,集成光电子学国家重点联合实验室,北京,100083
基金项目:国家重点基础研究发展规划(973计划),国家高技术研究发展计划(863计划)
摘    要:结合严格耦合波理论和遗传算法对C波段硅基导模共振滤波器进行了模拟分析.从模拟结果出发详细讨论了光栅周期、填充因子、光栅深度和入射角度对滤波器反射特性的影响.导模共振对光栅周期、填充因子、光栅深度和入射角度都有很高的敏感性,利用这一特点可以设计性能优异的硅基滤波器件.导模共振滤波器的共振波长峰值反射率达到了98.9%,峰值半高宽小于密集渡分复用(DWDM)O.8 nm的要求.
Abstract:
Simulated are silicon-based guided-mode resonant grating filters with narrow bandwidth for C-band optical communication.The effects of the characteristics of grating period,fill factor,the grating depth,the thickness of SiO_2 layer and incident angle on the reflection mechanisms of the filters are analyzed in detail based on the simulation results.Guided-mode resonant effect is very sensitive to such characteristics,which can be used to optimize silicon-based filters.The reflectance of the resonant wavelength of this filter reaches 98.9%,and the FWHM (full width at half maximum) is less than 0.8 nm limited by the DWDM (dense wavelength division multiplication) system.

关 键 词:导模共振  滤波器  介质光栅  硅基  严格耦合波理论

Simulation of Silicon-based Guided-mode Resonant Grating Filters with Narrow Bandwidth for C-band Optical Communication
GUO Jian-chuan,ZUO Yu-hua,ZHANG Ling-zi,ZHANG Yun,DING Wu-chang,CHENG Bu-wen,YU Jin-zhong,WANG Qi-ming.Simulation of Silicon-based Guided-mode Resonant Grating Filters with Narrow Bandwidth for C-band Optical Communication[J].Semiconductor Optoelectronics,2009,30(5).
Authors:GUO Jian-chuan  ZUO Yu-hua  ZHANG Ling-zi  ZHANG Yun  DING Wu-chang  CHENG Bu-wen  YU Jin-zhong  WANG Qi-ming
Abstract:Simulated are silicon-based guided-mode resonant grating filters with narrow bandwidth for C-band optical communication.The effects of the characteristics of grating period,fill factor,the grating depth,the thickness of SiO_2 layer and incident angle on the reflection mechanisms of the filters are analyzed in detail based on the simulation results.Guided-mode resonant effect is very sensitive to such characteristics,which can be used to optimize silicon-based filters.The reflectance of the resonant wavelength of this filter reaches 98.9%,and the FWHM (full width at half maximum) is less than 0.8 nm limited by the DWDM (dense wavelength division multiplication) system.
Keywords:guided-mode resonant  filter  dielectric grating  silicon-based  rigorous coupled-wave analysis (RCWA)
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