Photoelectric properties of ITO thin films deposited by DC magnetron sputtering |
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| Authors: | Liu Wei Cheng Shuying |
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| Affiliation: | College of Physics and Information Engineering,Institute of Micro-Nano Devices & Solar Cells,Fuzhou University,Fuzhou 350108,China |
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| Abstract: | As anti-reflecting thin films and transparent electrodes of solar cells,indium tin oxide(ITO) thin films were prepared on glass substrates by DC magnetron sputtering process.The main sputtering conditions were sputtering power,substrate temperature and work pressure.The influence of the above sputtering conditions on the transmittance and conductivity of the deposited ITO films was investigated.The experimental results show that, the transmittance and the resistivity decrease as the sputtering power increas... |
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| Keywords: | ITO thin films DC magnetron sputtering optical properties electrical properties |
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