Process parameters optimization for laser deposition of highT
c superconducting thin films on Si and other substrate materials |
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| Authors: | R D Vispute S T Bendre R Viswanathan S M Chaudhari S M Kanetkar S B Ogale |
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| Affiliation: | (1) Centre for Advanced Studies in Materials Science and Solid State Physics, Department of Physics, University of Poona, 411 007 Pune, India |
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| Abstract: | Thin films of Y-Ba-Cu-O superconductor have been deposited on different substrates by pulsed excimer laser ablation from a
superconducting pellet. The dependence of various process parameters such as substrate temperature, laser energy density,
oxygen partial pressure, applied bias field and cooling rates on the quality of the films has been studied. |
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| Keywords: | Superconducting thin films Y-Ba-Cu-O Si laser deposition |
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