| 离轴二次非球面补偿检验计算机辅助调整技术研究 |
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| 引用本文： | 薛栋林,郑立功,王淑平,张学军.离轴二次非球面补偿检验计算机辅助调整技术研究[J].光学精密工程,2006,14(3):380-385. |
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| 作者姓名： | 薛栋林 郑立功 王淑平 张学军 |
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| 作者单位： | 1. 中国科学院,长春光学精密机械与物理研究所,光学技术研究中心,吉林,长春,130033;中国科学院,研究生院,北京,100039
2. 中国科学院,长春光学精密机械与物理研究所,光学技术研究中心,吉林,长春,130033 |
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| 摘 要： | 分析了非球面补偿检验过程中由补偿器和镜面支撑结构的失调引入的调整量误差,给出了计算机辅助调整方法。建立了离轴二次非球面补偿检验计算机辅助调整系统的物理数学模型,求解了被检非球面镜的失调方位和量值,利用计算机控制调整架实现了系统辅助调整。建立了实验装置,给出了模拟调整和实际调整结果。经过计算机辅助调整后,被检离轴二次非球面的最终检验结果为0.028λ(RMS)(λ=632.8 nm)。
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| 关 键 词： | 非球面检验 补偿器 调整误差 计算机辅助调整 |
| 文章编号： | 1004-924X(2006)03-0380-06 |
| 收稿时间： | 2005-10-14 |
| 修稿时间： | 2006-04-08 |
Research on off-axis conic asphere null testing using computer-aided alignment method |
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| XUE Dong-lin,ZHENG Li-gong,WANG Shu-ping,ZHANG Xue-jun.Research on off-axis conic asphere null testing using computer-aided alignment method[J].Optics and Precision Engineering,2006,14(3):380-385. |
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| Authors: | XUE Dong-lin ZHENG Li-gong WANG Shu-ping ZHANG Xue-jun |
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| Affiliation: | 1. Changchun Institute of Optics ,Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China 2. Graduate School of the Chinese Academy of Sciences ,Beijin 100039,China |
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| Abstract: | The misalignment-induced aberrations by corrector and the support of the asphere were analyzed in this paper. A computed-aided alignment method was presented combining the interferometric test with the computer optimization for optical alignment, and a mathematical model was established to determine the misalignment. The simulated and actual experimental results of the alignment show that after four times alignment the test results of the asphere can reach up to 0.028λ(RMS) (λ=632.8 nm). |
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| Keywords: | asphere testing null corrector alignment error computer-aided alignment |
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