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| 基于Labview技术的消光式椭偏测厚仪的研究与设计 | |
| 引用本文： | 张诚,王金海,陈才和,张波,岳泉.基于Labview技术的消光式椭偏测厚仪的研究与设计[J].传感技术学报,2006,19(2):432-435. |
| 作者姓名： | 张诚 王金海 陈才和 张波 岳泉 |
| 作者单位： | 1. 天津工业大学,信息与通信工程学院,天津,300160 2. 天津工业大学,信息与通信工程学院,天津,300160;天津大学,精密仪器与光电子工程学院,光电信息技术科学教育部重点实验室,天津,300072 3. 天津大学,精密仪器与光电子工程学院,光电信息技术科学教育部重点实验室,天津,300072 |
| 摘 要： | 介绍了一种基于Labview的消光式椭偏仪光学测量系统,用于进行透明薄膜厚度的精确测量.研究并推导出消光式椭偏仪光学系统的数学模型及椭偏参数的计算公式.在理论研究的基础上,基于虚拟仪器设计技术,开发了信号采集、传输电路和编写测量软件,设计了椭偏仪的自动控制测量系统.通过对SiO2薄膜的测试,验证了仪器具有良好的可靠性和重复性,薄膜厚度误差小于100 A,折射率误差小于0.01. |
| 关 键 词： | 椭偏仪 消光法 虚拟仪器 |
| 文章编号： | 1004-1699（2006）02-0432-04 |
| 收稿时间： | 2005-06-20 |
| 修稿时间： | 2005年6月20日 |
The Research And Design Of Light Elimination Type Ellipsometer Based On Labview Technology |
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| ZHANG Cheng,WANG Jin-hai,CHEN Cai-he,ZHANG Bo,YUE Quan.The Research And Design Of Light Elimination Type Ellipsometer Based On Labview Technology[J].Journal of Transduction Technology,2006,19(2):432-435. | |
| Authors: | ZHANG Cheng WANG Jin-hai CHEN Cai-he ZHANG Bo YUE Quan |
| Affiliation: | 1. School of Information and Communication Engineering, Tianjin Polytechnic University, Tianjin 300160, China;2. College of Precision Instrument and Optoelectronics Engineering, Tianjin University, Key Laboratory of Optoelectronics Information Technical Science of EMC, Tianjin 300072, China |
| Abstract: | The paper introduces a light elimination type ellipsometer optical system based on Labview, which can realize accurate measurement of film thickness. The mathematical model of elimination type ellipsometer optical system and the formula of elliptical parameter are researched and deduced. By theory research, the circuit of signal acquiring and transforming and the measurement soft is developed. Based on virtual instrumentation technology, automatic control measurement system of ellipsometer is designed. Through the testing of SiO2 film, it has been proved that the reliability and repetition of the instrument are favorable. The measurement error of the film thickness is less than 100 A and the measurement error of the refractivity rate is less than 0. 01. |
| Keywords: | Labview |
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