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影响Sol—gel法制SnO2膜的因素及膜特性
引用本文:张建成,周跃,沈嘉祺.影响Sol—gel法制SnO2膜的因素及膜特性[J].材料研究学报,1998,12(3):239-244.
作者姓名:张建成  周跃  沈嘉祺
作者单位:上海大学!上海市,201800,上海大学,上海大学
基金项目:上海市教委重点学科立项资助
摘    要:Sn(OC2H5)4是制SnO2膜的前驱体之一,本文报道控制形成溶胶的Sn(OC2H5)4水解条件,水解产物pH值(≤3)及粘度等,研究了水解产物的热分解过程及膜的某些特性,包括得到较佳SnO2膜的合家热处理温度和加温速率,若干掺杂剂,电子束辐照及衬底加热温度对膜材的电学参数的影响,测定了涂膜后光纤的弯曲断裂强度与此类膜的气敏特性。

关 键 词:气敏材料  溶胶凝胶法  二氧化锡    制备  半导体
收稿时间:1998-06-25
修稿时间:1998-06-25

FACTORS OF AFFECTING SnO_2 FILMS PREPARED BY SOL-GEL METHOD AND THEIR CHARACTERISTICS
ZHANG Jiancheng,ZHOU Yue,SHEN Jiaqi.FACTORS OF AFFECTING SnO_2 FILMS PREPARED BY SOL-GEL METHOD AND THEIR CHARACTERISTICS[J].Chinese Journal of Materials Research,1998,12(3):239-244.
Authors:ZHANG Jiancheng  ZHOU Yue  SHEN Jiaqi
Affiliation:ZHANG Jiancheng,ZHOU Yue,SHEN Jiaqi (Dep.of Inorg.Mater.,Shanghai University,Shanghai )
Abstract:Sn(OC2H5)4 can be selected as one of the precursors that are used to prepare SnO2films. This paper has reported how to control the hydrozed conditions of Sn(OC2H5)4, pH value (53) and viscosity of the hydrolyzed products in order to form sol solution and so on. Process of the Pyrolysis for the hydrolyzed products and characteristics of the films have been also investigated,including selected suitable temperature of the hbat treatment to obtain better SnO2 films and the rate of rising temperaturel di5cussion of the influence of dopants (additives), electronic beam irradiation and the heating temperature of the substrates on electrical parameters of the films- measured the curvingintensity of the optical fibers coated by SnO2 films when the fiber was broken and also analysis of sensitive pecularity of the films for gases.
Keywords:
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