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Ti-Al-V-O纳米管阵列的制备与热稳定性研究
引用本文:黎朝晖,丁冬雁,宁聪琴,刘和刚. Ti-Al-V-O纳米管阵列的制备与热稳定性研究[J]. 微纳电子技术, 2011, 48(12): 773-776,781. DOI: 10.3969/j.issn.1671-4776.2011.12.004
作者姓名:黎朝晖  丁冬雁  宁聪琴  刘和刚
作者单位:1. 上海交通大学材料科学与工程学院微电子材料与技术研究所,上海,200240
2. 中国科学院上海硅酸盐研究所高性能陶瓷和超微结构国家重点实验室,上海,200050
基金项目:国家高技术研究发展计划(863计划)资助项目,国家自然科学基金资助项目,上海市浦江人才计划资助项目
摘    要:在醇基介质中采用阳极氧化方法成功在Ti6Al4V合金表面制备出大面积的α和β相均为纳米管结构阵列。通过扫描电子显微镜(SEM)和X射线能谱仪(EDXA)对纳米管阵列的表面形貌、微结构和热稳定性进行了表征。实验结果表明:在醇基溶液中采用阳极氧化方法制备大面积纳米管阵列时,外加电压的增加有利于合金表面多孔纳米结构的形成。在外加电压为30V时,Ti6Al4V合金表面的双相区均获得较为均匀的纳米管阵列。Ti-Al-V-O纳米管阵列管长约900nm、管径约90nm、壁厚约7.4nm。EDXA结果表明:在阳极氧化后,表面Al和V含量降低。Ti-Al-V-O纳米管阵列在550℃下晶化后,其表面形貌可保持规则的纳米阵列结构,而在更高温度下热处理可导致纳米管阵列局部坍塌并发生表面烧结致密化现象。

关 键 词:Ti-Al-V  阳极氧化  纳米阵列  热处理  氢传感器

Fabrication and Thermal Stability Research of Ti-Al-V-ONanotube Arrays
Li Zhaohui,Ding Dongyan,Ning Congqin,Liu Hegang. Fabrication and Thermal Stability Research of Ti-Al-V-ONanotube Arrays[J]. Micronanoelectronic Technology, 2011, 48(12): 773-776,781. DOI: 10.3969/j.issn.1671-4776.2011.12.004
Authors:Li Zhaohui  Ding Dongyan  Ning Congqin  Liu Hegang
Affiliation:Li Zhaohui1,Ding Dongyan1,Ning Congqin2,Liu Hegang1 (1.Institute of Microelectronic Materials and Technology,School of Materials Science and Engineering, Shanghai Jiao Tong University,Shanghai 200240,China;2.State Key Laboratory of High Performance Ceramics and Superfine Microstructure,Shanghai Institute of Ceramics,Chinese Academy of Sciences,Shanghai 200050,China)
Abstract:Large area nanotube arrays were successfully fabricated on the surface of Ti6Al4V alloy with the anodization in the alcohol group electrolyte.The surface morphology,microstructure and thermal stability of the nanotube arrays were characterized by the scanning electron microscope and energy dispersive X-ray analysis.The experimental results indicate that the applied voltage has the benefit for the formation of the porous nano structure at the surface of the alloy,when the large area nanotube arrays are fabricated with the anodization method in the alcohol group solution.When the anodization voltage increased to 30 V,regular nanotube arrays were obtained at the α and β phases of the alloy substrate.The length of the nanotube is approximately 900 nm,the diameter is about 90 nm,and the wall thickness is about 7.4 nm.The EDXA result shows that Al and V contents at the alloy surface are reduced after the anodization.Regular nanotube array structure of the surface morphology can be maintained after 550 ℃ heat treatment for crystallization.However,higher temperature heat treatment can lead to partial collapse or surface sintering densification for the nanotube arrays.
Keywords:Ti-Al-V  anodization  nanotube array  heat treatment  hydrogen sensor
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