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Density Measurement of Molten CaF2 by an Electrostatic Levitator

Authors:

I Minato H Fukuyama T Ishikawa P-F Paradis J Yu S Yoda

Affiliation:

(1) Department of Chemistry and Materials Science, Tokyo Institute of Technology, 2-12-1 Ookayama, Meguro, Tokyo 152-8552, Japan;(2) Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University, 2-1-1 Katahira, Aoba, Sendai 980-8577, Japan;(3) Japan Aerospace Exploration Agency (JAXA), 2-1-1 Sengen, Tsukuba Ibaraki, 305-8505, Japan

Abstract:

High-quality single crystalline calcium fluoride (CaF₂) has been of considerable practical concern as an optical lens to an excimer laser stepper in the deep-ultraviolet region due to its excellent transparency. Highly accurate thermophysical properties of molten CaF₂ are essential as input data for a numerical simulation of the crystal growth process. The density of molten CaF₂ has been successfully determined in the stable and undercooled liquid states (1600–1820 K) with an electrostatic levitator. The temperature dependence of the density of molten CaF₂ is given by

$\rho \hbox{/kg}\cdot \hbox{m}^{-3} = 3580-0.63T(\pm 1.6\% ).$

The coefficient of cubical expansion of molten CaF₂ has been determined to be

$\beta \hbox{/K}^{-\hbox{1}}=\frac{1}{5683-T}.$

Paper presented at the Seventeenth European Conference on Thermophysical Properties, September 5–8, 2005, Bratislava, Slovak Republic.

Keywords:

CaF₂ density electrostatic levitator undercooled liquid

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