| 激光诱导击穿光谱及其在元素分析中的应用 |
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| 引用本文： | 季振国,李铁强,席俊华,毛启楠. 激光诱导击穿光谱及其在元素分析中的应用[J]. 材料科学与工程学报, 2011, 0(3): 455-460,428 |
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| 作者姓名： | 季振国 李铁强 席俊华 毛启楠 |
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| 作者单位： | 杭州电子科技大学电子材料与器件工艺实验室;浙江大学硅材料国家重点实验室; |
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| 基金项目： | 国家自然科学基金资助项目(60576063); 浙江省科技计划资助项目(2008F70015,2009C31007) |
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| 摘 要： | 激光诱导击穿光谱是一种新的元素分析方法,但仍处于不断完善之中。利用它可以分析不同形态样品的成分,因此在成分分析和微量元素检测方面具有重要的应用前景。本文阐述了激光击穿诱导光谱仪的基本原理和激光诱导击穿光谱在多个领域中的应用,研究内容涉及固体样品、液体样品、气体样品、微量杂质分析和成分深度剖析等,并分析了基体效应、自吸收效应、测量时间、环境气体、激光参数等对激光诱导击穿光谱分析结果的影响。
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| 关 键 词： | 激光诱导击穿光谱 激光 紫外-可见光谱 元素检测 |
Laser-induced Breakdown Spectroscopy and its Applications in Elemental Analysis |
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| JI Zhen-guo,LI Tie-qiang,XI Jun-hua,MAO Qi-nan. Laser-induced Breakdown Spectroscopy and its Applications in Elemental Analysis[J]. Journal of Materials Science and Engineering, 2011, 0(3): 455-460,428 |
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| Authors: | JI Zhen-guo LI Tie-qiang XI Jun-hua MAO Qi-nan |
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| Affiliation: | JI Zhen-guo1,2,LI Tie-qiang1,XI Jun-hua2,MAO Qi-nan2(1.College of Electronic Information,Hangzhou Dianzi University,Hangzhou 310018,China,2.State Key Laboratory for Silicon Materials,Zhejiang University,Hangzhou 310027,China) |
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| Abstract: | Laser induced breakdown spectroscopy(LIBS) is a new method for elemental analysis,but it is still in the progress of improvement.It can be used to analyze samples in various states as a very useful composition and trace element analysis technique.In the present paper,the basic principles of LIBS is described,and applications of LIBS in elemental analysis in various fields are introduced for gaseous,solid state,and liquid state samples,and in trace element analysis,depth profile,etc.Factors which affect the ... |
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| Keywords: | laser-induced breakdown spectroscopy(LIBS) plasma UV-Vis spectroscopy elemental analysis |
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