Ku-band stop filter implemented on a high resistivity silicon with inverted microstrip line photonic bandgap (PBG) structure |
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| Authors: | Man-Lyun Ha Young-Se Kwon |
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| Affiliation: | Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., Daejon, South Korea; |
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| Abstract: | We have developed the inverted microstrip line photonic bandgap (IML-PBG) structure using the surface micro-machining technology on the high resistivity silicon (HRS) substrate. Because, when the IML was fabricated, the holes for removing a sacrificial layer were necessary, we have introduced these holes into the PBG structure for the Ku-band stop filter (BSF). Rectangular spiral PBG structure showed the notch characteristics and the array with suitable distance showed the stop band with under -20 dB from 15 to 19 GHz and under -3 dB pass-band loss. |
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