| 溶胶-凝胶法制备MgO薄膜的研究 |
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| 引用本文： | 武光明,符晓荣,林成鲁. 溶胶-凝胶法制备MgO薄膜的研究[J]. 功能材料, 1999, 30(6): 631-632 |
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| 作者姓名： | 武光明 符晓荣 林成鲁 |
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| 作者单位： | 北京石油化工学院基础部!北京102600，中国科学院上海冶金所!信息功能材料国家重点实验室，上海200050，中国科学院上海冶金所!信息功能材料国家重点实验室，上海200050 |
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| 摘 要： | 本文采用非金属醇盐以醋酸镁为起始原料，胶棉液为添加剂，在Ｓｉ（１００） 衬底上成功地制备了ＭｇＯ 薄膜。结果表明，薄膜的晶体结构与胶棉液的含量及退火温度有关。同时，用Ｘ射线衍射（ ＸＲＤ） 、原子力显微电镜（ＡＦＭ） 和透射电镜（ ＴＥＭ） 对薄膜的微观结构进行了分析。这种制备ＭｇＯ 薄膜的新方法还未见有报道。
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| 关 键 词： | MgO 薄膜 溶胶-凝胶法 |
A New Sol-Gel Approach to Prepare MgO Thin Films |
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| WU Guangming ,FU Xiaorong ,LIN Chenglu Beijing Institute of Petrochemical Technology,Beijing,,China, National Key Laboratory of Functional Materials for Informatics. A New Sol-Gel Approach to Prepare MgO Thin Films[J]. Journal of Functional Materials, 1999, 30(6): 631-632 |
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| Authors: | WU Guangming FU Xiaorong LIN Chenglu Beijing Institute of Petrochemical Technology Beijing China National Key Laboratory of Functional Materials for Informatics |
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| Affiliation: | WU Guangming 1,FU Xiaorong 2,LIN Chenglu 2 1 Beijing Institute of Petrochemical Technology,Beijing,102600,China, 2 National Key Laboratory of Functional Materials for Informatics,Shanghai Institute of Metallurgy,Chinese Academy of Science,Shang |
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| Abstract: | In this research,MgO thin films have been successfully prepared on Si substrate by a novel and simple sol-gel method.The results indicated that the structures of MgO films were closely related to the amount of collodion and the annealing temperature.In addition,the microstructure of the MgO thin films were examined with X-ray diffraction (XRD),Atomic Force Morphology (AFM) and Transmission Electron Micrograph (TEM). To our knowledge,such a new method to prepare MgO thin films has not been reported previously. |
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| Keywords: | MgO thin film sol-gel method |
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