| 微波等离子体化学气相沉积技术制备金刚石薄膜的研究 |
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| 引用本文： | 罗丽,汪明朴,谢丹,李周.微波等离子体化学气相沉积技术制备金刚石薄膜的研究[J].材料导报,2006(2):36-39. |
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| 作者姓名： | 罗丽 汪明朴 谢丹 李周 |
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| 作者单位： | 中南大学材料科学与工程学院,长沙410083 |
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| 基金项目： | 国家“十五”攻关子项目（编号： 2001BA310A03-1） |
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| 摘 要： | 介绍了微波等离子体化学气相沉积法（MPCVD）制备金刚石薄膜的研究情况，重点论述了该法的制备工艺对金刚石薄膜质量的影响及其制备金刚石薄膜的应用前景。
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| 关 键 词： | 微波等离子体 化学气相沉积 金刚石薄膜 |
Studies on Diamond Film Grown by Microwave Plasma Chemical Vapor Deposition |
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| LUO Li ,WANG Mingpu,XIE Dan,LI Zhou.Studies on Diamond Film Grown by Microwave Plasma Chemical Vapor Deposition[J].Materials Review,2006(2):36-39. |
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| Authors: | LUO Li WANG Mingpu XIE Dan LI Zhou |
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| Affiliation: | School of Materials Science and Engineering, Central South University, Changsha 410083 |
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| Abstract: | Studies of diamond film grown by microwave plasma chemical vapor deposition are introduced. The influence of the process parameter on the qualities of diamond film is reviewed emphatically, and the application of the microwave plasma chemical vapor deposition to prepare diamond film is discussed. |
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| Keywords: | microwave plasma chemical vapor deposition diamond film |
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