| 集成微光机电系统研究现况及其产业化前景 |
| |
| 引用本文： | 王跃林,王渭源.集成微光机电系统研究现况及其产业化前景[J].功能材料与器件学报,2000,6(1):1-6. |
| |
| 作者姓名： | 王跃林 王渭源 |
| |
| 作者单位： | 中国科学院上海冶金研究所传感技术国家重点实验室,上海,200050 |
| |
| 摘 要： | 本文介绍了国际集成微光机电系统的研究现况及其产业化前景 ;在此基础上 ,提出了对我国加快这一领域的研究和产业化的看法
|
| 关 键 词： | 微电子机械系统 微系统 信息系统 产业化 |
| 修稿时间： | : |
RESEARCH AND INDUSTRIALIZATION OF INTEGRATED MICRO OPTO MECHATRONICS SYSTEMS, THE PRESENT AND FUTURE |
| |
| WANG Yue-lin,WANG Wei-yuan.RESEARCH AND INDUSTRIALIZATION OF INTEGRATED MICRO OPTO MECHATRONICS SYSTEMS, THE PRESENT AND FUTURE[J].Journal of Functional Materials and Devices,2000,6(1):1-6. |
| |
| Authors: | WANG Yue-lin WANG Wei-yuan |
| |
| Abstract: | In this paper, the international trends on the research and industrialization of Integrated Micro Opto Mechatronics Systems are described. On this basis, the idea to speed up the research and industrialization in this field in China are suggested. |
| |
| Keywords: | Integrated Micro Opto Mechatronics Systems Micro Electro Mechanical Systems Micro Systems |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
