| 声表面波压力传感器的仿真与设计 |
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| 引用本文： | 向龙,秦廷辉,蒋平英,谢晓,彭锦婕,钱俊江. 声表面波压力传感器的仿真与设计[J]. 压电与声光, 2015, 37(2): 201-204 |
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| 作者姓名： | 向龙 秦廷辉 蒋平英 谢晓 彭锦婕 钱俊江 |
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| 作者单位： | （1.重庆邮电大学 光电工程学院，重庆400065；;2.中国电子科技集团第26研究所，重庆 400060） |
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| 基金项目： | 重庆市科委基金资助项目（cstc2013yykfB40010） |
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| 摘 要： | 该文设计了一种基于声表面波(SAW)传感原理的无源无线压力传感器。阐述了SAW单端谐振器的原理,对SAW压力传感器的原理进行了分析。选择了基于类似两端固定梁的敏感结构并利用ANSYS软件对其敏感结构进行仿真、分析。利用Mathcad软件对SAW压力传感器进行建模、仿真。并根据仿真结果设计和制作了SAW压力传感器。测试结果表明,制作的传感器灵敏度较高,误差小,具备良好的压力频率特性。
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| 关 键 词： | 声表面波 压力传感器 谐振器 ANSYS Mathcad |
Simulation and Design of SAW Pressure Sensor |
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| XIANG Long,QIN Tinghui,JIANG Pingying,XIE Xiao,PENG Jinjie and QIAN Junjiang. Simulation and Design of SAW Pressure Sensor[J]. Piezoelectrics & Acoustooptics, 2015, 37(2): 201-204 |
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| Authors: | XIANG Long QIN Tinghui JIANG Pingying XIE Xiao PENG Jinjie QIAN Junjiang |
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| Affiliation: | (1. College of Optoelectronic Engineering, Chongqing University of Posts and Telecommunications, Chongqing 400065,China;;2. 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060,China) |
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| Abstract: | A passive and wireless pressure sensor based on SAW has been designed in this work.Firstly,the principle of SAW one port resonator was presented. Secondly,the principle of SAW pressure sensor was analyzed.The sensitive structure based on similar both ends fixed beam has been chosen and the simulation and analysis of the sensitive structure have been carried out by ANSYS software.SAW pressure sensor has been modeled and simulated by using Mathcad software.The tested results show that the fabricated sensor has the features of high sensitivity,very small errors and good pressure frequency. |
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| Keywords: | surface acoustic wave(SAW) pressure sensor resonator ANSYS Mathcad |
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