| 衍射法X射线激光分束光栅平行度测量系统(英文) |
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| 引用本文： | 谭鑫,刘颖,刘正坤,付绍军.衍射法X射线激光分束光栅平行度测量系统(英文)[J].功能材料与器件学报,2009,15(1). |
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| 作者姓名： | 谭鑫 刘颖 刘正坤 付绍军 |
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| 作者单位： | 中国科学技术大学国家同步辐射实验室,合肥,230029 |
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| 摘 要： | 介绍了软X射线光栅分束镜Mach-Zehnder干涉等离子体诊断系统调整用双频光栅线条平行度的衍射法测量系统.该系统主要由激光器,准直镜,待测光栅,精密转台(含角度测量仪),直线工作台,光栅调节架和探测器组成.分析了系统中各种误差对测量精度的影响其中包括距离测量误差、波长误差、光栅准直误差即光栅刻线与入射光和反射光组成的平面不垂直、光栅转动过程的误差、光栅表面面型误差、探测器误差,经计算得到系统的绝对误差为minute.计算表明,该系统的测量精度满足软X射线Mach-Zehnder干涉系统对双频调整光栅的性能要求.
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| 关 键 词： | 双频光栅 平行度 衍射法 |
Performance of a soft x-ray splitter grating parallelism measuring system by diffraction method |
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| TAN Xin,LIU Ying,LIU Zheng-kun,FU Shao-jun.Performance of a soft x-ray splitter grating parallelism measuring system by diffraction method[J].Journal of Functional Materials and Devices,2009,15(1). |
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| Authors: | TAN Xin LIU Ying LIU Zheng-kun FU Shao-jun |
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| Affiliation: | National Synchrotron Radiation Laboratory;University of Science and Technology of China;Hefei 230029;China |
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| Abstract: | We present new progress in the diffraction grating interferometer being pre-aligned used a double frequency grating.To measure the parallelism of the double frequency grating to a nicety before built in the interferometer,a device based on Diffraction Technique for measuring the parallelism of the double frequency grating is designed.It is built of a semiconductor laser,a collimator,gratings,a precision turnplate,a beeline workbench,a redressal shelves,a ccd detector.The system error of the device is analyz... |
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| Keywords: | Double frequency grating parallelism diffraction technique |
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