| 基于ACIS的MEMS工艺几何仿真的关键算法 |
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| 引用本文： | 徐景辉,苑伟政,常洪龙,谢建兵. 基于ACIS的MEMS工艺几何仿真的关键算法[J]. 压电与声光, 2007, 29(1): 96-99 |
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| 作者姓名： | 徐景辉 苑伟政 常洪龙 谢建兵 |
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| 作者单位： | 西北工业大学,微/纳米系统实验室,陕西西安,710072 |
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| 基金项目： | 国家高技术研究发展计划(863计划) |
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| 摘 要： | 针对微机械系统(MEMS)工艺几何仿真提出了一种算法,该算法通过设置实体模型上表面的实体和高度两个属性,解决了MEMS工艺几何仿真中产生的多个实体模型之间相对位置定义的问题。该算法在工艺几何仿真系统中的实现表明,使用此算法后,系统运行稳定可靠,仿真速度快。
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| 关 键 词： | 微机电系统 几何仿真 算法 |
| 文章编号： | 1004-2474(2007)01-0096-03 |
| 修稿时间： | 2005-10-20 |
A Key Algorithm for MEMS Process Geometrical Simulation Based on ACIS |
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| XU Jing-hui,YUAN Wei-zheng,CHANG Hong-long,XIE Jian-bing. A Key Algorithm for MEMS Process Geometrical Simulation Based on ACIS[J]. Piezoelectrics & Acoustooptics, 2007, 29(1): 96-99 |
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| Authors: | XU Jing-hui YUAN Wei-zheng CHANG Hong-long XIE Jian-bing |
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| Abstract: | An algorithm is explored to MEMS process geometrical simulation by setting 3D models' top surface solids and heights,which can give a good resolution of definition for the relative position among 3D models carried out in MEMS process geometrical simulation.The algorithm is well realized in MEMS process geometrical simulation and indicates that the speed of simulation is much higher than that in systems available now. |
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| Keywords: | ACIS |
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