R.F. sputtering of plastics |
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| Authors: | D.T. Morrison T. Robertson |
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| Affiliation: | The Plessey Co. Ltd., Capacitor Division, Bathgate, West Lothian, Scotland;Cameron Iron Works Ltd., Houston Industrial Estate, Livingston, Scotland |
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| Abstract: | This paper outlines the application of r.f. sputtering to plastic as a means of obtaining thinner dielectric layers with good electrical properties for use in the capacitor industry.The construction and characteristics of the sputtering system employed to obtain thin films of PTFE are described. A brief résumé of the differences observed between such films and conventional PTFE is included together with a short discussion of the observed electrical behaviour. |
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