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| 高温扩散炉恒温区温度的自动控制 | |
| 引用本文： | 刘玉强 刘晓为. 高温扩散炉恒温区温度的自动控制[J]. 哈尔滨工业大学学报, 1999, 31(3): 84-87 |
| 作者姓名： | 刘玉强 刘晓为 |
| 作者单位： | 哈尔滨工业大学微电子中心 |
| 摘 要： | 介绍了一种可用于温控领域的ＭＣＳ－５１单片机应用系统。系统可实现对８路热电偶信号的巡回监控，其软件采用区间线性拟事对信号进行非线性修正，并蛳位置式ＰＩＤ算法进行运算处理。系统输出可调整高温扩散炉各段炉丝的加热功率，最终实现双炉管高温擅长 用炉恒温区温度的自动控制。 |
| 关 键 词： | 高温扩散炉 恒温区 单片机控制 温度控制 扩散炉 |
Temperature Control in Two-thermostat Areas of Double-Pipe ugh Temperature Diffusing Furnace |
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| Liu Yuqiang, Liu Xiaowei, Wang Xilian, Wang Wei. Temperature Control in Two-thermostat Areas of Double-Pipe ugh Temperature Diffusing Furnace[J]. Journal of Harbin Institute of Technology, 1999, 31(3): 84-87 | |
| Authors: | Liu Yuqiang Liu Xiaowei Wang Xilian Wang Wei |
| Abstract: | A MCS-51 system used in the temperature control field can monitor the 8-channel thermocouple sig- signals. The non--linear correchon to the temperature signals by the multi-area linear fitting and the Increment-located PID algorithm are used in the related software. The power of the each heater in the High Temperature DiffuSing Furnace (caF) is adjusted by the output Of the system. The temperature coned in twO-the~tat areas of the doublepipe caF is realiaal successfully. |
| Keywords: | Single chip computer PID algorithm linear fitting High Temperature Diffusing Furnace |
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