Fabrication of ionic liquid thin film by nano-inkjet printing method using atomic force microscope cantilever tip |
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Authors: | Kiyohiro Kaisei Kei Kobayashi Kazumi Matsushige Hirofumi Yamada |
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Affiliation: | 1. Department of Electronic Science and Engineering, Kyoto University, Kyoto 615-8510, Japan;2. Innovative Collaboration Center, Kyoto University, Kyoto 615-8520, Japan |
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Abstract: | We demonstrate the fabrication of thin films of ionic liquid (IL), 1-butyl-3-methyl-imidazolium tetrafluoborate, by nano-inkjet printing method using an atomic force microscope (AFM) cantilever. The IL filled in a pyramidal hollow of the AFM cantilever tip was extracted from an aperture at the bottom of the hollow and deposited onto a Pt substrate when the bias voltage was applied between the cantilever and the substrate. We succeeded in fabricating IL thin films with a thickness of 4 nm. The areas and thicknesses of IL thin films were controlled by the fabrication conditions in this method, which is also useful for the investigations of nanometer-scale properties of ionic liquid. |
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Keywords: | Local deposition Ionic liquid Thin film Atomic force microscopy |
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