Defect levels in chromium-doped silicon

The transient capacitance technique has been used to study the chromium-related levels in the silicon band gap. Chromium was diffused at temperature of 1100 and 1150°C for 0.5 and 3 hr. Five different levels at E_c?0.11 eV, E_c?0.21 eV, E_c?0.28 eV, E_c?0.36 eV and E_c?0.45 eV were obtained from the Arrheniu plots of the electron thermal-emission rates. The number of levels in the upper half of the band gap decreased from five to two with an increase of Cr-diffusion period. Two levels were located at E_c?0.20 eV (donor) and E_c?0.43 eV (acceptor). A donor level was also observed at E_v + 0.25 eV. The donor level was not affected by the diffusion condition. The majority carrier capture cross sections of the three dominant levels have been measured by the transient capacitance technique modified by the pulse transformer. The values were σ_n = 4.1 × 10^?15 cm² for the upper donor at E_c?0.20 eV, σ_n = 2.0 × 10^?16 cm² for the acceptor at E_c ?0.43 eV and σ_p = 9.1 × 10^?18 cm² for the lower donor at E_v + 0.25 eV, and were independent of temperature. The three dominant levels are due to distinct chromium centers.