| 石英晶体表面溅射成膜及频率偏离特性的研究 |
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| 引用本文： | 赵龙章. 石英晶体表面溅射成膜及频率偏离特性的研究[J]. 真空, 2003, 0(1): 25-28 |
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| 作者姓名： | 赵龙章 |
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| 作者单位： | 扬州大学,江苏,扬州,225009 |
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| 摘 要： | 提出了用磁控溅射法在石英晶体表面形成TiN薄膜，研究了TiN薄膜的性能及其频率偏离特性。对生物检疫和液体粘度等动态测定有广阔的应用前景。
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| 关 键 词： | 石英晶体 表面溅射成膜 频率偏离特性 氮化钛薄膜 磁控溅射 |
| 文章编号： | 1002-0322(2003)01-0025-04 |
| 修稿时间： | 2002-10-05 |
Study on frequency deviation by magnetron sputtering thin film on quartz crystal |
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| ZHAO Long zhang. Study on frequency deviation by magnetron sputtering thin film on quartz crystal[J]. Vacuum(China), 2003, 0(1): 25-28 |
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| Authors: | ZHAO Long zhang |
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| Abstract: | A method to get thin film TiN by magnetron sputtering on quartz crystal is put forward in this article. For performances of thin film TiN and its frequency deviation feature, its applications in the dynamics biosensor and the viscosity measure of liquid have wide foreground. |
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| Keywords: | magnetron sputtering quartz crystal frequency deviation |
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