固结磨料垫高效研磨氟化钙晶体研究

氟化钙晶体的高效精密研磨加工是实现其超精密抛光加工的前提。采用单晶金刚石和聚集体金刚石磨料制备固结磨料垫(FAP)，对比研究其研磨加工性能，探索不同种类的金刚石磨粒在固结磨料研磨垫自修整过程中的作用机理。结果表明:采用聚集体金刚石磨料制成的FAP研磨效率明显高于单晶金刚石FAP的，且其材料去除率更稳定，同时聚集体金刚石FAP的自修整能力要优于单晶金刚石FAP的。在10 kPa压力下，采用初始粒径为3～5 μm的聚集体金刚石FAP研磨氟化钙晶体，其材料去除率达13.0 μm/min, 表面粗糙度值R_a为130.0 nm。 

Study on high efficient lapping of calcium fluoride crystal with fixed abrasive pad

The high efficiency lapping of calcium fluoride crystal is the prerequisite of its ultra-precision polishing. Two kinds of abrasives, single crystal diamond and agglomerated diamond were chosen to prepare the fixed abrasive pad (FAP). A comparison of lapping performance between agglomerated diamond FAP and single crystal diamond FAP was made. And the role of different kinds of diamond abrasives in self-conditioning process of FAP was explored. The results show that the lapping efficiency of FAP embedded with agglomerated diamond abrasives is obviously higher than the FAP embedded with single crystal diamond. The material removal rate of FAP embedded with agglomerated diamond is more stable during the process, which means its self-conditioning performance is much better than the FAP embedded with single crystal diamond. When adopting the agglomerated diamond with a original size of 3 to 5 μm as the abrasives of FAP and a lapping load of 10 kPa, the material removal rate of calcium fluoride crystal can reach 13.0 μm/min and the average surface roughness R_a is 130.0 nm.