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Investigations of surface structure for thermally evaporated silicon on a Cu(111) surface
Authors:J.S. Tsay  A.B. Yang  F.S. Shiu
Affiliation:a Department of Physics, National Taiwan Normal University, 88, Section 4, Ting-Chou Road, Taipei 116, Taiwan, ROC
b Department of Physics, Tunghai University, Taichung 407, Taiwan, ROC
Abstract:The surface structure and composition of semiconductor/Cu(111) films prepared by thermal evaporation in an ultrahigh vacuum condition have been investigated. As Si atoms were deposited on a Cu(111) surface, diffused View the MathML source spots were observed up to 2 monolayers while 1 × 1 spots become dimmer as revealed using low-energy electron diffraction technique. Because of a larger electron affinity of Si than that of Cu, the Cu L3M45M45 Auger line shifts to a lower kinetic energy. Annealing treatments at 425 K causes a splitting of the Cu L3M45M45 line. This shows the interdiffusion at the Si/Cu interface and the formation of a Cu-rich surface layer. After annealing treatments, the View the MathML source domains grow and aggregate to form larger domains as revealed by the decreasing full-width at half maximum of diffraction spots. Ge/Cu(111) shows 1 × 1 structure as annealing up to 500 K. Lack of a dominant structure and a large valence diameter of Ge result in different structures as compared to Si/Cu(111).
Keywords:Silicides   Low-energy electron diffraction   Auger electron spectroscopy   Silicon
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