Fabrication of Ni-shims using UV-moulding as an intermediate step |
| |
Authors: | Juha Pietarinen Samuli Siitonen Janne Laukkanen |
| |
Affiliation: | a University of Joensuu, Department of Physics, P.O. Box 111, FIN-80101 Joensuu, Finland b Infotonics Center, University of Joensuu, P.O. Box 111, FIN-80101 Joensuu, Finland |
| |
Abstract: | We fabricated nickel-shims including various types of structures with dimensions from hundreds of nanometers to several microns. The mastering process was made by electron-beam lithography, lift-off and reactive ion etching techniques. Then the structures were copied into a UV-curable ORMOCER-material and the Ni-shims were fabricated by electroforming using UV-copies as masters. The experiments showed that the use of UV-copying evades typical quartz master sticking and cracking problems. Furthermore, all features were replicated in the final Ni-shim as they existed in the quartz master proving the method suitable for the fabrication of the Ni-shims from the quartz masters with high precision. |
| |
Keywords: | Ni-shims UV-moulding |
本文献已被 ScienceDirect 等数据库收录! |
|