| 系统压强对微波等离子体化学气相沉积金刚石成核的影响 |
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| 引用本文： | 王志明,夏义本,杨莹,方志军,王林军,居建华,张伟丽,范轶敏.系统压强对微波等离子体化学气相沉积金刚石成核的影响[J].功能材料与器件学报,2001,7(3):326-329. |
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| 作者姓名： | 王志明 夏义本 杨莹 方志军 王林军 居建华 张伟丽 范轶敏 |
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| 作者单位： | 上海大学材料科学与工程学院, |
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| 摘 要： | 为了在氧化铝上制备（100）定向织构的金刚石薄膜，必须先提高金刚石的成核密度，在微波等离子体化学气相沉积（MPCVD）系统中，采用低压成核的方法，在氧化铝陶瓷上沉积出高成核密度的金刚石薄膜，扫描电镜显示其成核密度可达10^8cm^-2。在此基础上，沉积出（100）织构的金刚石薄膜。
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| 关 键 词： | MPCVD 金刚石膜 氧化铝 气体压力 成核密度 |
| 文章编号： | 1007－4252(2001)03－0326－04 |
| 修稿时间： | 2000年10月18 |
Influence of pressure on nucleation of diamond by microwave plasma enhanced chemical vapor deposition synthesis |
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| WANG Zhi-ming,XIA Yi-ben,YANG Ying,FANG Zhi-jun,WANG Lin-jun,JU Jian-hua,ZHANG Wei-li,FAN Yi-min.Influence of pressure on nucleation of diamond by microwave plasma enhanced chemical vapor deposition synthesis[J].Journal of Functional Materials and Devices,2001,7(3):326-329. |
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| Authors: | WANG Zhi-ming XIA Yi-ben YANG Ying FANG Zhi-jun WANG Lin-jun JU Jian-hua ZHANG Wei-li FAN Yi-min |
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| Abstract: | In order to grow diamond film on alumina ceramic, it is essential to control the diamond
nucleation properly. Under gas pressure lower than that used for growth, the high density nucleation
of diamond films on alumina was successfully achieved by microwave plasma－enhanced chemical vapor
deposition (MPCVD). Observation of SEM demonstrated that the nuclear density could be as high as
108/cm2. Based on this, 100]－textured diamond film was successfully deposited on alumina ceramic. |
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| Keywords: | MPCVD diamond film alumina substrates gas pressure nucleation density |
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