| 压电移相器的空间旋转误差建模与实验分析 |
| |
| 引用本文： | 王道档,杨甬英,刘东,田超,骆永洁,卓永模.压电移相器的空间旋转误差建模与实验分析[J].光电子．激光,2009,20(5). |
| |
| 作者姓名： | 王道档 杨甬英 刘东 田超 骆永洁 卓永模 |
| |
| 作者单位： | 浙江大学现代光学仪器国家重点实验室,浙江,杭州,310027
|
| |
| 摘 要： | 通过对压电移相器在微位移过程中端面旋转的数学建模,对其空间旋转误差进行了理论分析;基于该数学模型,利用泰曼一格林干涉系统对两种不同工艺制作的移相器进行了在线检测,根据干涉条纹的旋转及间距变化,可以定量分析高精度移相器在微位移移相过程中其端面的旋转角度以及空间任意点的位移误差,并给出了相关实验结果.表明:用该方法在线检测各种不同工艺制作的移相器,对其端面上任意点由于端面旋转引起的空间位移误差检测灵敏度达到pm量级.在0～100 V驱动电压范围内进行在线移相检测,实验测量移相器的位移精度优于λ/200,对应相移精度高于0.06 rad.
|
| 关 键 词： | 移相器 误差分析 数学建模 泰曼-格林干涉系统 测量精度 |
Modeling and analysis of space-rotation error induced by phase-shifter in phase shifting interferometry |
| |
| WANG Dao-dang,YANG Yong-ying,LIU Dong,TIAN Chao,LUO Yong-jie,ZHUO Yong-mo.Modeling and analysis of space-rotation error induced by phase-shifter in phase shifting interferometry[J].Journal of Optoelectronics·laser,2009,20(5). |
| |
| Authors: | WANG Dao-dang YANG Yong-ying LIU Dong TIAN Chao LUO Yong-jie ZHUO Yong-mo |
| |
| Affiliation: | State Key Laboratory of Modern Optical Instrumentation;Zhejiang University;Hangzhou 310027;China |
| |
| Abstract: | Based on the mathematical model that describes the end-rotation of piezoelectric actuator as phase-shifter,the space-rotation error is analyzed in theory.According to the model,phase-shifters of two different processing ways are tested on Twyman-Green interference system,respectively.By processing the fringe rotation and interval changes,the phase-shifter end rotation and its space-rotation error can be analysed.With this method,the detecting sensitivity for spatial displacement induced by phase-shifter end... |
| |
| Keywords: | phase-shifter error analysis mathematical modeling Twyman-Green interference system measurement precision |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
| 点击此处可从《光电子．激光》浏览原始摘要信息 |
|
点击此处可从《光电子．激光》下载全文 |
|
