| 双段式加热锗单晶生长设备的结构设计 |
| |
| 引用本文： | 原洛渭,高利强. 双段式加热锗单晶生长设备的结构设计[J]. 电子工业专用设备, 2008, 37(2): 11-14 |
| |
| 作者姓名： | 原洛渭 高利强 |
| |
| 作者单位： | 西安理工大学工厂,陕西,西安,710077 |
| |
| 摘 要： | 锗单晶和锗单晶片是重要的半导体材料,锗单晶的生长广泛采用的是CZ(直拉)法,其主要结构包括底座及立柱装置、下传动装置、主炉室、插板阀、副炉室、籽晶提升旋转机构、液压驱动装置、真空系统、充气系统及水冷系统等。
|
| 关 键 词： | 锗单晶 双段式加热 单晶炉 |
| 文章编号： | 1004-4507（2008）02-0010-04 |
| 收稿时间： | 2008-01-12 |
| 修稿时间： | 2008-01-12 |
Design of A Two-stage Heating Single Crystal Germanium Growth Furnace |
| |
| Yuan Luo-wei,Gao Li-qiang. Design of A Two-stage Heating Single Crystal Germanium Growth Furnace[J]. Equipment for Electronic Products Marufacturing, 2008, 37(2): 11-14 |
| |
| Authors: | Yuan Luo-wei Gao Li-qiang |
| |
| Abstract: | Germanium single crystal and monocrystalline germanium slices are important semiconductor materials. CZ method has been applied widely in the growth of the germanium single crystal. The main equipment includes base, main column, crucible pull part, main furnace, flashboard valve,auxiliary furnace,seed pulling machine & circumgyrating equipment,hydraulic pressure drive device,vacuum system,gas filling system and water-cooling system. |
| |
| Keywords: | Single Crystal Germanium double resistive heater the single crystal growth furnace |
| 本文献已被 维普 万方数据 等数据库收录！ |
|
