Clarifications of the mechanism of nano-fluctuation of aerostatic thrust bearing with surface restriction |
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| Affiliation: | 1. Department of Mechanical Eng., Graduate School of Engineering, Doshisha University, 1-3 Miyakodani, Tatara, Kyotanabe, Kyoto 610-0394, Japan;2. Department of Mechanical Eng., Doshisha University, 1-3 Miyakodani, Tatara, Kyotanabe, Kyoto 610-0394, Japan;3. Department of Mechanical Eng., Kyoto University, Yoshida-Honmachi, Sakyo-ku, Kyoto 606-8501, Japan;1. Institute of Machinery Manufacturing Technology, China Academy of Engineering Physics, Mianyang, 621000 People''s Republic of China;2. State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai, 200240 People''s Republic of China;1. Institute of Vibration, Shock and Noise, State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai, 200240, PR China;2. Collaborative Innovation Center for Advanced Ship and Deep-Sea Exploration, Shanghai, 200240, PR China;3. China National Technical Import & Export Corporation, Beijing, 100055, PR China;1. College of Mechanical and Vehicle Engineering, Hunan University, Changsha 410082, China;2. Key Laboratory of High Performance Complex Manufacturing, Central South University, Changsha 410082, China;1. School of Mechatronics Engineering, Harbin Institute of Technology, China;2. Key Laboratory of E&M, Ministry of Education & Zhejiang Province, Zhejiang University of Technology, China |
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| Abstract: | Fluctuations of objects supported by aerostatic bearings are a severe problem for ultraprecise positioning technology. The cause of small fluctuations, called nano-fluctuations of objects supported by the thrust bearing was investigated. An aerostatic thrust bearing with surface restriction by T-shaped grooves was the focus of this study. A computational fluid analysis of the airflow around the bearing was conducted and compared with experimental photographs. In addition, the amount of nano-fluctuations was measured by changing the bearing clearance and inlet pressure of the bearing. The nano-fluctuation was induced by the fluctuation of atmospheric pressure due to the unsteady airflow around the bearing edge, and the amount of the fluctuation depended on the Reynolds number corresponding to the flow velocity. |
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