微机械电磁继电器三维磁场分析及其电磁系统优化设计

基于微机电系统(MEMS)技术研制的微型继电器具有体积小、功耗低、开关迅速、稳定性高等优势，将有效弥补传统电磁继电器和固态继电器之间的不足。其三维磁场分析是电磁系统优化设计的基础。文中应用毕奥-萨伐尔定律和积分方程法，分析了微机械电磁继电器磁场分布特性，计算结果与有限元法结果进行比较，表明所用方法对于微机械电磁继电器三维恒定磁场的分析是可行的。基于已有模型的结构特点设计了电磁系统的改进方案，通过分析比较活动电极电磁吸力的分布规律，确定了中心平面线圈结构设计方案将更加合理。结合线圈圈数、激励电流与电磁吸力之间的关系，完成了电磁系统的优化设计。所得结论对于微机械电磁继电器的设计具有一定的理论意义与实用价值。

Three-dimensional Magnetic Field Analysis and Optimum Design of Electromagnetic System for Micro-electro-mechanical Relay

With the advantage of small volume, low power consumption, quickly switch, and high stability, the micro-electro-mechanical relay may bridge the performance and economic gaps between conventional electromagnetic relay and solid state relay. Analysis of three-dimensional magnetic field is the foundation work for optimum design of electromagnetic system. In this paper the magnetic distribution character of micro-electro-mechanical relay was analyzed by applying Biot-Savart law and integral equation method(IEM). The results of IEM and FEM show the method which used in analyzing three-dimensional stationary magnetic field for Micro-electro-mechanical relay is feasible. The revised schemes were designed basing on the original model features, and central planer coil structure was preferable by analyzing electromagnetic attraction force of movable contact. The optimum design was realized associated with the relationship among coil turns, exciting current and electromagnetic attraction force. The conclusions are valuable in theory and practice to design Micro-electro-mechanical relay.