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Controllable size and photoluminescence of ZnO nanorod arrays on Si substrate prepared by microwave-assisted hydrothermal method
Affiliation:1. Otto Schott Institute of Materials Research (OSIM), Friedrich Schiller University Jena, Löbdergraben 32, 07743 Jena, Germany;2. Institute of Science and Technology for Ceramics – National Research Council of Italy (CNR-ISTEC), via Granarolo 64, 48018 Faenza, RA, Italy;3. Department of Chemical Science and Technologies, University of Rome Tor Vergata, via della Ricerca Scientifica, 00133 Rome, Italy;4. Instituto de Ciencia de Materiales de Madrid (ICMM), Consejo Superior de Investigaciones Científicas (CSIC), C/Sor Juana Inés de la Cruz 3, 28049 Madrid, Spain;5. Center for Energy and Environmental Chemistry Jena (CEEC Jena), Friedrich Schiller University Jena, Philosophenweg 7a, 07743 Jena, Germany;1. CAS Key Laboratory of Magnetic Materials and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China;2. School of Materials and Chemical Engineering, Ningbo University of Technology, Ningbo 315211, China;3. Department of Physics, Case Western Reserve University, Cleveland, OH, 44106, USA;1. Department of Electrophysics, National Chiao Tung University, 1001 Ta Hsueh Road, Hsinchu, Taiwan, ROC;2. Shenzhen Key Lab of Laser Engineering, Key Lab of Advanced Optical Precision Manufacturing Technology of Guangdong Higher Education Institutes, College of Optoelectronic Engineering and College of electronic Science and Technology Shenzhen University, Shenzhen, Guangdong 518060, PR China;3. Department of Physics, National Chung Hsing University, Taichung, Taiwan, ROC
Abstract:High-quality ZnO nanorod arrays were grown on silicon substrates by microwave-assisted hydrothermal method. A ZnO seed layer deposited by magnetron sputtering was used for promoting nanorod growth. Process optimization indicates that the size and surface density of nanorods can be controlled individually by varying process parameters including precursor concentration, heating temperature, and heating time. The photoluminescence performance of the nanorods is closely dependent on the mean size of the rods. Reducing rod diameter leads to decreased UV emission and visible emission intensity ratio, which has been attributed to the increased impurities or defects on the rod surface. The present results provide a feasible approach to modify the optical properties of transparent ZnO nanorod arrays.
Keywords:ZnO  Nanorod arrays  Microwave-assisted hydrothermal method  Photoluminescence  Seed layer
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