Affiliation: | (1) School of Chemical Engineering and Technology, Chonbuk National University, Jeonju, 561-756, Korea;(2) Department of Semiconductor Science and Technology, Chonbuk National University, Jeonju, 561-756, Korea;(3) FED Project Team, Samsung Advanced Institute of Technology, P.O. Box 111, Suwon, 440-600, Korea |