V含量对TaVN复合膜微结构、力学性能和摩擦性能的影响

采用磁控溅射仪制备了一系列不同V含量的TaVN复合膜, 利用X射线衍射仪研究复合膜以及磨痕的相组成, 利用纳米压痕仪表征复合膜的硬度, 采用高温摩擦磨损实验机研究了复合膜的室温和高温摩擦性能。结果表明: TaVN复合膜的微结构为面心立方结构, 随着V含量的增加, 衍射峰择优取向由(200)转变为(111); TaVN薄膜的显微硬度随着V含量增加, 先增加后降低, 在V含量为18.25at%时, 显微硬度达到最大值, 为32.3 GPa; 在常温下, TaVN复合膜的摩擦系数随着V含量的增加而降低; 当温度从室温升高到800℃, 薄膜的摩擦系数先升高后降低。采用晶体化学理论讨论了TaVN复合膜和TaN单层膜在高温下的摩擦机理。

Influence of V Content on Microstructure,Mechanical and Friction Properties of TaVN Composite Films

A series of TaVN composite films with different V contents were fabricated by magnetron sputtering technique. The microstructures, mechanical properties, friction properties at different temperatures were investigated by X-ray diffraction, nano-indentation, CSM high-temperature ball-on-disc tribo-meter, respectively. The results show that the microstructure of TaVN films has fcc structure. With V content increasing, the preferential orientation changes from (111) to (200), and the hardness increases to a peak value (32.3 GPa) and then decreases. At room temperature, the friction coefficient of TaVN films decreases as V content increases, which may be related to the formation of V₂O₅. When the temperatures increase from room temperature to 800℃, the friction coefficient increases and then decreases. The friction mechanisms of TaVN composite films and TaN film at high temperature are compared based on the crystal chemistry theory.