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An Alternative Method for SU-8 Removal Using PDMS Technique |
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| Authors: | Li Jianhua CHEN Di Zhang Jinya LIU Jingquan Zhu Jun |
| Abstract: | An alternative method for SU-8 removal is proposed.Instead of directly using SU-8 microstructure as the electroplating mold,a polydimethysiloxane (PDMS) replica is employed.The metallic micromold insert obtained through this method can be easily peeled off from the PDMS replica,meanwhile with high resolution and smooth surfaces. |
| Keywords: | SU-8 removal electroplating PDMS micromold insert high-aspect-ratio microstructures |
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