| 硼浓度对沉积在刀具上的金刚石膜表面的影响 |
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| 引用本文： | 王传新 汪建华 满卫东 马志斌 王升高 伍新明 屈青. 硼浓度对沉积在刀具上的金刚石膜表面的影响[J]. 武汉化工学院学报, 2004, 26(3): 51-53 |
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| 作者姓名： | 王传新 汪建华 满卫东 马志斌 王升高 伍新明 屈青 |
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| 作者单位： | [1]武汉化工学院湖北省等离子体化学与新材料重点实验室，湖北武汉430073 [2]中国科学院等离子体物理研究所，安徽合肥230031 |
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| 基金项目： | 湖北省科技攻关计划 ( 2 0 0 2 AA1 0 5 A0 2) |
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| 摘 要： | 在热丝CVD装置中，以氢气、丙酮、硼酸三甲脂为原料，在YG6上制备了含硼金刚石薄膜．研究丙酮中硼含量对薄膜表面晶形及晶粒度的影响．结果表明，薄膜中渗入适量的硼不改变薄膜表面晶形，细化晶粒．有利于薄膜附着力的提高；而过高的硼含量恶化金刚石薄膜质量，降低薄膜附着力．
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| 关 键 词： | 热丝CVD YG6刀具 金刚石薄膜 渗硼 |
| 文章编号： | 1004-4736(2004)03-0051-03 |
| 修稿时间： | 2004-01-05 |
Effect of boron concentration on HFCVD diamond films grown on cemented carbide inserts |
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| WANG Chuanxin. Effect of boron concentration on HFCVD diamond films grown on cemented carbide inserts[J]. Journal of Wuhan Institute of Chemical Technology, 2004, 26(3): 51-53 |
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| Authors: | WANG Chuanxin |
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| Affiliation: | WANG Chuanxin~ |
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| Abstract: | In this article we report preliminary results of the boron concentration variation on the surface morphology, quality and adhesion of diamond films deposited on WC-Co substrates. Hydrogen, acetone and B(CH_3)_3 were used as reactive materials. The results have shown that the crystal size decreased and the adhesion of diamond coatings increased with moderate boron concentration, but the crystal morphology did not change obviously. With the addition excessive of boron, the quality of the grown diamond films decreased and the adhesion of diamond films were also decreased. |
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| Keywords: | hot filament CVD cemented carbide diamond film boron |
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