| 制备工艺对多孔阳极氧化铝模板的影响 |
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| 引用本文： | 付琳捷,李美亚,汪晶,江华,郭冬云.制备工艺对多孔阳极氧化铝模板的影响[J].微纳电子技术,2008,45(2):109-113. |
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| 作者姓名： | 付琳捷 李美亚 汪晶 江华 郭冬云 |
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| 作者单位： | 1. 武汉大学,物理科学与技术学院,武汉,430072
2. 武汉大学,物理科学与技术学院,武汉,430072;武汉大学,声光材料与器件教育部重点实验室,武汉,430072 |
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| 基金项目： | 湖北省自然科学基金
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国家重点基础研究发展计划(973计划) |
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| 摘 要： | 以草酸溶液为电解液,采用二次氧化法制备了AAO模板,利用自制的实验装置,制备出了高度有序的多孔AAO模板,利用扫描电子显微镜(SEM)对其形貌进行了表征。分析了阴阳极间距、制备电压以及草酸溶液浓度对制备AAO模板的影响。经对比讨论,得到了制备AAO模板的优化条件为电压40V,草酸浓度0.5mol/L,阴阳极间距3～5cm。制备的AAO模板的纳米孔径约为100nm,纳米孔径排列规则、笔直且互相平行。分析了多孔AAO模板的形成机理。
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| 关 键 词： | 阳极氧化铝模板 纳米孔 草酸溶液 二次氧化 阴阳极间距 |
| 文章编号： | 1671-4776(2008)02-0109-05 |
| 修稿时间： | 2007年9月21日 |
Effects of Fabrication Methods on Porous |
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| Fu linjie,Li meiya,Wang jing,Jiang hua,Guo dongyun.Effects of Fabrication Methods on Porous[J].Micronanoelectronic Technology,2008,45(2):109-113. |
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| Authors: | Fu linjie Li meiya Wang jing Jiang hua Guo dongyun |
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| Affiliation: | Anodic Aluminum Oxide Templates Fu linjiea,Li meiyaa,b,Wang jinga,Jiang huaa,Guo dongyuna,b (a. Department of Physics,b. Key Laboratory of Acoustic , Photonic Material , Device of the Ministry of Education,Wuhan University,Wuhan 430072,China) |
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| Abstract: | The oxalic acide was used as electrolyte in the experiments and the two-step oxidation method was adopted to fabricate AAO templates. Scanning electron microscopy (SEM) was used to characterize the morphology of the templates. The effects of the voltage, solution concentration and anode-cathode distance on the ordered extent of as-prepared AAO templates were studied. Based on comparison and discussion, the optimum conditions of fabricating AAO templates were obtained: the voltage is 40 V, the oxalic concent... |
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| Keywords: | anodic aluminum oxide(AAO) template nanopores oxalic acide two-step oxidation anode-cathode distance |
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