| 振动式微型发电机的研究现状与发展趋势 |
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| 引用本文： | 唐彬,温志渝,温中泉,董媛.振动式微型发电机的研究现状与发展趋势[J].微纳电子技术,2007,44(5):254-258,263. |
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| 作者姓名： | 唐彬 温志渝 温中泉 董媛 |
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| 作者单位： | 重庆大学,微系统研究中心光电技术及系统教育部重点实验室,重庆,400044 |
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| 基金项目： | 国家“863”资助项目（2005AA404280） |
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| 摘 要： | 微能源具有体积小,重量轻等特点,是军民两用高新技术发展的迫切需求,已成为近年来MEMS领域的一个重要发展方向。微能源主要分为微型电池和微型发电机两大类。本文着重介绍基于MEMS技术的微型发电机的研究现状和通过振动实现能量转换的发电机系统及其电磁式、静电式和压电式三种主要实现方法,指出了微型发电机的发展趋势。
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| 关 键 词： | 微机电系统 振动式发电机 电磁 静电 压电 |
| 文章编号： | 1671-4776（2007）05-0254-05 |
| 修稿时间： | 2006-11-30 |
Current R&D of the Micro Vibration-Based Generator |
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| TANG Bin,WEN Zhi-Yu,WEN Zhong-quan,DONG Yuan.Current R&D of the Micro Vibration-Based Generator[J].Micronanoelectronic Technology,2007,44(5):254-258,263. |
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| Authors: | TANG Bin WEN Zhi-Yu WEN Zhong-quan DONG Yuan |
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| Affiliation: | Key Laboratory of Optoelectronic Technology and Systems, Micro-System Research Center of Chongqing University, Chongqing 400044, China |
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| Abstract: | Micro power is an urgent demand in the field of both army and civil advanced technique development,it becomes the novel study field for MEMS.It has the characters of small volume,light weight,and so on.Micro power can be classified into two kinds:micro cell and micro generator.The current research status and the trend of the technology are introduced,and the vibration-based generator is focused by three ways including electromagnetism type,electrostatic type,and piezoelectricity out.The trend of the micro generator is pointed out. |
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| Keywords: | MEMS vibration-based generator electromagnetism electrostatic piezoelectricity |
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