Au-MgF2复合纳米颗粒薄膜的制备和微结构

用射频磁控共溅射法制备了Au体积分数分别为6%、15%、25%、40%、50%和60%的Au-MgF2复合纳米颗粒薄膜.用X射线衍射、透射电镜、X射线光电子能谱对薄膜的微结构和组分进行了测试分析,分析结果表明:制备的Au-MgF2复合纳米颗粒薄膜由fcc-Au晶态纳米微粒镶嵌于主要为非晶态的MgF2陶瓷基体中构成,当Au体积百分含量由15%增至60%时,其平均晶粒尺寸由5.1nm增大到21.2 nm,晶格常数由0.399 84nm增大到0.407 43nm;随Au体积百分含量由6%增至50%,其颗粒平均粒径则由9.8nm增至21.4 nm.名义组分为vol.60%Au-MgF2样品中Au的体积百分含量约为62.6%,与设计值基本一致.

Growth and Structure Characterization of Composite Au-MgF2 Nanoparticle Films

The composition and microstructures of the composite Au MgF 2 nanoparticle films,grown by RF magnetron co sputtering,were studied with X ray diffraction (XRD),transmission electron microscopy (TEM) and X ray photoelectron spectroscopy (XPS).The results show that the films are mainly composed of fcc Au nanoparticles embedded in amorphous MgF 2 matrix.When Au volume fraction increases from 15% to 60%,the average crystalline grain size of gold grows from 5.1 nm to 21.2 nm and its crystal constant changes from 0.39984 nm to 0.40743 nm.As Au volume fraction increases from 6% to 50%,its average particle diameter increases from 9.8 nm to 21.4 nm.The nominal vol.60% Au MgF 2 composite nanoparticle film is 62.6%,in good agreement with the expected value.