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| 钝化层质量对高压功率器件可靠性的影响 | |
| 引用本文： | 刘侠,夏晓娟,孙伟锋. 钝化层质量对高压功率器件可靠性的影响[J]. 固体电子学研究与进展, 2009, 29(3) |
| 作者姓名： | 刘侠 夏晓娟 孙伟锋 |
| 作者单位： | 东南大学电子科学与工程学院国家专用集成电路系统工程技术研究中心,南京,210096 |
| 摘 要： | 针对钝化层质量对高压VDMOS器件可靠性的影响做了研究。通过流片生产中的产品遇到的实际问题,分析了高压VDMOS器件的钝化层可能存在的离子或者受热应力对器件可靠性的不良影响,并在实际工艺和芯片设计上作出了相应的改进,流片验证可靠性得到了有效的改善。 |
| 关 键 词： | 垂直双扩散金属氧化物场效应管 可靠性 钝化层 |
Passivation Layer Quality Impact on the Reliability of High-voltage Power Device |
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| LIU Xia,XIA Xiaojuan,SUN Weifeng. Passivation Layer Quality Impact on the Reliability of High-voltage Power Device[J]. Research & Progress of Solid State Electronics, 2009, 29(3) | |
| Authors: | LIU Xia XIA Xiaojuan SUN Weifeng |
| Abstract: | This paper discusses the impact of the passivation layer quality on the reliability of high breakdown voltage VDMOS devices.According to failure samples of a high breakdown voltage VDMOS device during the engineering lots,it is found that the ions in the passivation layer and thermal stress may cause adverse effects on VDMOS devices.The proposed methods were taken in the later design and process flow to improve the devices reliability. |
| Keywords: | VDMOS reliability passivation layer |
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