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Cu2O薄膜的制备方法
引用本文:孙杰,高斐,权乃承,晏春愉,张佳雯,郝培风,刘立慧.Cu2O薄膜的制备方法[J].材料开发与应用,2009,24(4):93-96.
作者姓名:孙杰  高斐  权乃承  晏春愉  张佳雯  郝培风  刘立慧
作者单位:陕西师范大学,物理学与信息技术学院,陕西,西安,710062
摘    要:氧化亚铜(Cu2O)薄膜在太阳能电池及其它光电器件上有重要应用,它具有无毒、制备成本低、材料广泛易得等优点。制备Cu2O薄膜的方法主要有热蒸发、溅射、化学气相沉积和电化学沉积等,本文对Cu2O薄膜的制备方法进行了综述与展望。

关 键 词:氧化亚铜薄膜  热蒸发  溅射  化学气相沉积

Preparation of Cu_2O Thin Films
SUN Jie,GAO Fei,QUAN Nai-cheng,YAN Chun-yu,ZHANG Jia-wen,HAO Pei-feng,LIU li-hui.Preparation of Cu_2O Thin Films[J].Development and Application of Materials,2009,24(4):93-96.
Authors:SUN Jie  GAO Fei  QUAN Nai-cheng  YAN Chun-yu  ZHANG Jia-wen  HAO Pei-feng  LIU li-hui
Affiliation:SUN Jie,GAO Fei,QUAN Nai-cheng,YAN Chun-yu,ZHANG Jia-wen,HAO Pei-feng,LIU li-hui (School of Physics Information Technology,Shaanxi Normal University,Xi'an 710062,China)
Abstract:Cu2O thin films have important applications in solar cells and photoelectric devices for their advantages such as non-toxicity,low production cost and abundance of the material.Cu2O thin films can be prepared by using various deposition techniques such as thermal evaporation,sputtering,chemical vapor deposition and electrodeposition.The preparation methods of Cu2O thin films have been reviewed and prospected in this paper.
Keywords:Cu2O thin films  Thermal evaporation  Sputtering  Chemical vapor deposition  
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